Highly sensitive accelerometer
View Patent ↗Accelerometers for determining acceleration and methods of fabricating an accelerometer are disclosed. In one embodiment, the accelerometer includes a frame, a mass movably suspended on the frame, a fixed element having a rounded surface that does not move with respect to the frame, a movable element having a rounded surface that moves with the mass, and a sensing coil of optical waveguide wrapped around the rounded surfaces to detect movement of the mass in response to acceleration based on interferometric sensing of a change in length of the sensing coil. A method of fabricating the accelerometer includes suspending the mass in the frame and wrapping the optical waveguide around the rounded surfaces. Sensitivity and low fabrication cost of the accelerometers enables their use for integration within an ocean bottom seismic cable. Further, the accelerometer may be an in-line or a cross-line accelerometer depending on the arrangement within the frame.
1. A cross-line accelerometer, comprising:
a rigid frame;
a mass hinged to the rigid frame and movable in response to an acceleration in a linear direction;
a fixed element rigidly coupled to the rigid frame, the fixed element disposed on a first side of the mass and defining a first surface;
a movable element coupled to the mass for movement therewith, the movable element defining a second surface and disposed on a second side of the mass opposite the first side of the mass, wherein the fixed element and the movable element are linearly spaced from one another in a direction perpendicular to the linear direction; and
a sensing coil at least partly wrapped around the first and second surfaces, wherein a change in length of the sensing coil is indicative of the acceleration.
2. The cross-line accelerometer of claim 1 , wherein one or more blades couple the second side of the mass to the rigid frame, the one or more blades flexible in the linear direction and substantially inflexible in other directions.
3. The cross-line accelerometer of claim 1 , further comprising a biasing member disposed in contact with a portion of the mass opposite a hinge point of the mass with respect to the rigid frame.
4. The cross-line accelerometer of claim 3 , wherein the biasing member is a spring.
5. The cross-line accelerometer of claim 1 , wherein the sensing coil comprises multiple wraps of an optical waveguide.
6. The cross-line accelerometer of claim 1 , wherein the rigid frame includes two parallel frame plates with the mass, the fixed element and the movable element located between the two parallel frame plates.