Magnetoresistive sensor device
View Patent ↗According to the present invention, a magnetoresistive sensor device, which can be manufactured at a high yield and a low cost, is excellent in magnetoresistance characteristics and is reliable can be provided. The magnetoresistive sensor device comprises a substrate, a signal processing circuit formed on the substrate, a flattening film for flattening the signal processing circuit, a silicon nitride film formed on the flattened signal processing circuit, and magnetoresistive sensor elements formed on the silicone nitride film, in which the flattening film is preferably a spin-on-glass (SOG) film.
1. An on-vehicle magnetoresistive sensor device, comprising:
a substrate;
a signal processing circuit formed on the substrate;
a flattening film for flattening the signal processing circuit;
a silicon nitride film formed on the flattened signal processing circuit;
magnetoresistive sensor elements formed on the silicone nitride film; and
a protective layer consisting of a silicon nitride film formed on the magnetoresistive sensor elements,
wherein a film stress of the silicon nitride film formed on the flattened signal processing circuit and a film stress of the silicon nitride film formed on the magnetoresistive sensor elements is between −1.0×10 8 N/m 2 and 1.0×10 8 N/m 2 .
2. The on-vehicle magnetoresistive sensor device according to claim 1 , wherein the flattening film is a spin-on-glass (SOG) film.
3. The on-vehicle magnetoresistive sensor device according to claim 1 , wherein the signal processing circuit includes a circuit portion formed on the substrate, an interlayer insulating layer formed on the circuit portion, a first wiring formed on the interlayer insulating layer and a protective film formed on the interlayer insulating layer and the first wiring.