Piezoelectric device
View Patent ↗A piezoelectric device includes: a package including a first recessed part provided on a first surface of the package, a second recessed part provided on a second surface of the package, and a penetrating part passing partially from the first recessed part through the second recessed part; a piezoelectric element housed in the first recessed part; a lid disposed on the upper side of the first recessed part; an IC chip disposed and fixed in the second recessed part of the package so as to block a part of the penetrating part; and a sealing part provided to the second recessed part. The IC chip and the sealing part close up the penetrating part and the lid seals the first recessed part air-tightly. A piezoelectric device is provided. The piezoelectric device realizes thickness reduction thereof without undergoing warpage and breakage of an IC chip or a package thereof.
1. A piezoelectric device, comprising:
a package including a first recessed part provided on a first surface of the package, a second recessed part provided on a second surface of the package, and a penetrating part passing partially from the first recessed part through the second recessed part;
a piezoelectric element housed in the first recessed part;
a lid disposed on the upper side of the first recessed part;
an IC chip disposed and fixed in the second recessed part of the package so as to block a part of the penetrating part; and
a sealing part provided to the second recessed part, wherein the IC chip and the sealing part close up the penetrating part and the lid seals the first recessed part air-tightly.
2. The piezoelectric device according to claim 1 , wherein at least one lateral face of the second recessed part is open.