System and method for using a two part cover and a box for protecting a reticle
View Patent ↗Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
1. A method, comprising:
covering a first portion of a reticle with a removable particle cover assembly to form an arrangement that protects the first portion of the reticle from being contaminated, a portion of the removable particle cover assembly being moveable away from the reticle when the reticle is at an exposure position before exposure of the reticle;
enclosing the arrangement inside a box formed by coupling a base to a lid separable from the base, the base supporting the reticle, the box protecting the reticle from contaminants; and
transporting the arrangement inside the box.
2. The method of claim 1 , further comprising:
using a gas sealing device to prevent gas flow between the base and the lid; and
using a latch to removably secure the lid to the base.
3. The method of claim 1 , wherein the reticle comprises a reflective reticle.
4. A method, comprising:
covering a first portion of a reticle with a removable particle cover assembly to form an arrangement that protects the first portion of the reticle from being contaminated, a portion of the removable particle cover assembly being moveable away from the reticle when the reticle is at an exposure position before exposure of the reticle;
enclosing the arrangement inside a box formed by coupling a base to a lid, the base supporting the reticle, the box protecting the reticle from contaminants;
transporting the arrangement inside the box;
using a gas sealing device to prevent gas flow between the base and the lid;
using a latch to removably secure the lid to the base;
substantially preventing particles within the box from reaching the reticle using a dome at an interior side of the lid; and
substantially preventing a flow of particles between the dome and the base using a particle sealing device.
5. The method of claim 4 , wherein operations of the gas sealing device and the particle sealing device occur sequentially.
6. The method of claim 5 , further comprising:
using a device to couple the dome to the lid, the device including at least a spring that applies a compressive force on the particle sealing device as the lid approaches the base during closure of the box, wherein the particle sealing device is compressible.
7. The method of claim 6 , further comprising:
biasing the reticle against the base to immobilize the reticle during transportation using another spring coupled to an interior side of the dome.
8. The method of claim 4 , wherein:
when closing the box, the particle sealing device is at least partially engaged before the gas sealing device starts to compress; and
when opening the box, the gas sealing device is substantially decompressed and separated from at least one of the lid and base before the particle sealing device starts to disengage.
9. The method of claim 4 , further comprising:
allowing gas to flow from the sealed cavity formed between the dome and the base to the remaining interior volume of the box, and back using a passage.
10. A method, comprising:
covering a first portion of a reticle with a removable particle cover assembly to form an arrangement that protects the first portion of the reticle from being contaminated, a portion of the removable particle cover assembly being moveable away from the reticle when the reticle is at an exposure position before exposure of the reticle;
enclosing the arrangement inside a box formed by coupling a base to a lid, the base supporting the reticle, the box protecting the reticle from contaminants;
transporting the arrangement inside the box; and
securing the removable particle cover assembly to a stage located at the exposure position.
11. A method, comprising:
covering a first portion of a mask with a removable particle cover to form an arrangement that protects the first portion from being contaminated and that leaves a second portion of the mask uncovered;
enclosing the arrangement inside a gas-tight box having a base coupled to a lid separable from the base, the base supporting the reticle, the box protecting the mask from contaminants; and
transporting the arrangement inside the box.
12. The method of claim 11 , wherein the mask comprises a reflective mask.