Portable composite bonding inspection system
In a surface inspection system for detecting particles on a surface, a light source mounted to illuminate the surface provides multiple wavelength ranges of electromagnetic radiation. An optical detector produces an image of the surface. An optical signal is produced indicative of returned electromagnetic radiation at each of a plurality of the multiple wavelength ranges from a field of view on the surface. A processor operating on the optical signals resolves presence of a contaminant as a function of the optical signals, and produces a contaminant signal responsive to presence of a contaminant. A heating means positioned to evolve contaminants from the surface is responsively coupled to be activated in response to a contaminant signal. The multiple wavelength ranges comprise ultraviolet, visible, and infrared wavelengths. The processor comprises means to perform false color contrast stretching.
1. A surface inspection system for detecting particles on a surface, comprising: a light source mounted to illuminate the surface, the light source providing multiple wavelength ranges of electromagnetic radiation, an optical detector to produce an image of the surface, an optical detector producing an optical signal indicative of returned electromagnetic radiation at each of a plurality of the multiple wavelength ranges of a field of view on the surface, a processor operating on the optical signals to resolve presence of a contaminant as a function of the optical signals, and producing a contaminant signal responsive to presence of a contaminant, and a heating means positioned to evolve contaminants from the surface, said heating means being responsively coupled to be activated in response to a contaminant signal, wherein the multiple wavelength ranges comprise ultraviolet, visible, and infrared wavelengths and wherein said processor comprises means to perform false color contrast stretching.
2. A surface inspection system according to claim 1 further comprising an analyzer positioned to receive a contaminant evolved from the surface.
3. A surface inspection system according to claim 2 wherein said analyzer comprises a mass spectrometer.
4. A surface inspection system according to claim 3 wherein heating means comprises a laser.