Method for forming a resist pattern
View Patent ↗A resist composition used for the imprint lithography process, a method for forming resist pattern using the same, an array substrate manufactured using the same, and method of fabricating the array substrate includes an additive and the adhesion promoter inducing the chemical bond of the base layer contacting to the UV curable resin. As a result, it is possible for the resist composition to form a high-resolution pattern and to improve the durability of the mold for molding a UV curable resin.
1. A method of forming resist pattern comprising:
forming a resist layer including a UV curable resin, an adhesion promoter, a coupling agent and optionally a light initiator on a substrate;
applying a mold with a predetermined pattern to the resist layer;
forming a preliminary resist pattern, wherein the predetermined pattern of the mold is transcribed onto the resist layer;
forming a resist pattern by hardening the preliminary resist pattern using ultraviolet rays; heating the resist pattern at a temperature higher than a glass transition temperature to move chains of the UV curable resin and for chemically coupling the adhesion promoter and the substrate; and
separating the mold from the resist pattern;
wherein a surface of the base layer has an OH group that reacts with the adhesive promoter by the heating, and the mold is formed of hydrophilic material ˜wherein the adhesion promoter is one of an epoxy-based compound or an urethane-based compound,
wherein a content of the adhesion promoter is about 10 wt % to about 20 wt % of the entire content of the resist composition,
wherein the coupling agent is at least one of a gamma-glycidoxypropyl trimethoxy silane, a mercapto propyl trimethoxy silane and a methyl trimethoxy silane, and
wherein a content of the coupling agent is within 5 wt % to 10 wt % of the entire resist composition.
2. The method of forming resist pattern according to claim 1 , wherein UV light is radiated onto the mold and onto the resist pattern when hardening the preliminary resist pattern.
3. The method of forming resist pattern according to claim 1 , wherein heating the resist pattern is performed in a chamber.
4. The method of forming resist pattern according to claim 1 , wherein the substrate on which the resist layer is formed is arranged on a heated stage when applying the mold with the predetermined pattern to the resist layer.
5. The method of forming resist pattern according to claim 1 , wherein the substrate on which the preliminary resist pattern is formed is positioned on a heated stage when hardening the preliminary resist pattern.