Nanowire-based opto-electronic device
View Patent ↗Nanowire-based opto-electronic devices including nanowire lasers, photodetectors and semiconductor optical amplifiers are disclosed. The devices include nanowires grown from single crystal and/or non-single surfaces. The semiconductor optical amplifiers include nanowire arrays that act as ballast lasers to amplify a signal carried by a signal waveguide. Embodiments of the nanowire lasers and photodetectors include horizontal and vertical nanowires that can provide different polarizations.
1. A nanowire-based opto-electronic device, comprising:
a main substrate;
a first protrusion including a first insulating layer formed on the main substrate and a first crystal material layer formed on the first insulating layer, wherein the first crystal material layer is isolated from the main substrate by the first insulating layer and includes at least one first surface;
a second protrusion including a second insulating layer formed on the main substrate and a second crystal material layer formed on the second insulating layer, wherein the second crystal material layer is isolated from the main substrate by the second insulating layer and includes at least one second surface, each second surface being electrically isolated from a respective first surface; and
at least one first nanowire connecting at least one opposing first pair of the first and second surfaces in a bridging configuration, wherein the first nanowire is grown from the first and second surfaces, and interconnects between the first and second surfaces, of the first pair of the first and second surfaces.
2. The nanowire-based opto-electronic device of claim 1 , further comprising:
a first Bragg mirror formed on or adjacent at least one first surface; and
a second Bragg mirror formed on or adjacent at least one second surface opposite the at least one first surface;
at least one second nanowire grown from the first surface or the second surface of at least one opposing second pair of the first and second surfaces;
wherein each opposing pair of the first and second Bragg mirrors defines an optical cavity comprising at least one second nanowire; and
wherein the first and second nanowires comprise a group III-V compound semiconductor material.
3. The nanowire-based opto-electronic device of claim 2 , wherein the first nanowire and/or the second nanowire comprises an active region comprising a quantum dot or a heterojunction.
4. The nanowire-based opto-electronic device of claim 1 , comprising a plurality of the first nanowires connecting at least the first pair of the first and second surfaces in a bridging configuration, wherein the first nanowires are grown from, and interconnect between, the first and second surfaces of the first pair of the first and second surfaces, wherein the first nanowires comprise a group III-V compound semiconductor material.
5. The nanowire-based opto-electronic device of claim 1 , wherein:
electrical contacts are formed on or in each of the first and second protrusions.
6. The nanowire-based opto-electronic device of claim 1 , wherein each of the first and second crystal material layers comprises a non-single crystal material selected from the group consisting of polycrystalline silicon, amorphous silicon, microcrystalline silicon, diamond and diamond-like carbon.
7. The nanowire-based opto-electronic device of claim 6 , wherein the main substrate comprises a single crystal material.
8. The nanowire-based opto-electronic device of claim 1 , wherein:
the first and second crystal material layers each comprise a single or non-single crystal material, and
the main substrate comprises a single crystal material or a non-single crystal material selected from the group consisting of microcrystalline silicon, amorphous silicon, glass, quartz, polymers and metals.