Pressure transponder with surface acoustic wave sensor
View Patent ↗The invention relates to a pressure sensor, the measuring cell of which is provided with at least one membrane for the protection of the pressure-sensitive element and a measuring chamber, filled with pressure medium, in which the pressure-sensitive element is housed. According to the invention, the membrane is monitored for damage, whereby at least one surface wave sensor is arranged in the chamber filled with pressure medium. On damage to the membrane occurring, process medium is mixed with the pressure medium. A substance change in the sensitive region of the surface wave sensor is thus brought about which results in a differing signal run time. Any change in run time is an indictor of damage to the pressure sensor and may be signaled as such.
1. A pressure sensor having a pressure-sensitive element and pressure supply sides, each pressure supply side comprising a measurement chamber that includes at least one first surface acoustic wave sensor and a membrane that protects the pressure-sensitive element, wherein the measurement chamber is filled with a pressure medium, such that the at least one first surface acoustic wave sensor is wetted by the pressure medium.
2. The pressure sensor as claimed in claim 1 , wherein the first surface acoustic wave sensor has a transmitting element and a receiving element, which are connected to an amplifier to form a resonant circuit.
3. The pressure sensor as claimed in claim 2 , wherein the first surface acoustic wave sensor is configured to generate a response based on a threshold-value circuit.
4. The pressure sensor as claimed in claim 1 , wherein the first surface acoustic wave sensor is configured to generate a response based on a threshold-value.
5. The pressure sensor as claimed in claim 4 , wherein a second surface acoustic wave sensor is arranged in each measurement chamber and is associated with the at least one first surface acoustic wave sensor, which is wetted by the pressure medium, of the same measurement chamber.
6. The pressure sensor as claimed in claim 4 , wherein a second surface acoustic wave sensor is arranged in a measurement chamber and is associated with the at least one first surface acoustic wave sensors which are wetted by the pressure medium.
7. The pressure sensor as claimed in claim 1 , wherein a second surface acoustic wave sensor is arranged in each measurement chamber and is associated with the first surface acoustic wave sensor, which is wetted by the pressure medium, of the same measurement chamber.
8. The pressure sensor as claimed in claim 1 , wherein a second surface acoustic wave sensor is arranged in the measurement chamber and is associated with the at least one first surface acoustic wave sensors which are wetted by the pressure medium.