Bonding wire for semiconductor device
View Patent ↗The present invention provides a bonding wire improved in formability of a ball part, improved in bondability, good in loop controllability, improved in bonding strength of a wedge connection, securing industrial production ability as well, and mainly comprised of copper which is more inexpensive than gold wire, that is, provides a bonding wire for a semiconductor device comprised of a bonding wire having a core material having copper as its main ingredient and a surface covering layer over the core material and of a conductive metal of a composition different from the core material, characterized in that the surface covering layer has as its main ingredients two or more types of metals selected from gold, palladium, platinum, rhodium, silver, and nickel and the surface covering layer has a concentration gradient of one or both of a main ingredient metal or copper in the wire radial direction.
1. A bonding wire for a semiconductor device comprised of a core material having copper as its main ingredient and a surface covering layer over said core material of a conductive metal different from the core material, characterized in that said surface covering layer has as its main ingredients two or more metals selected from gold, palladium, platinum, rhodium, silver, and nickel, wherein said surface covering layer has a portion having a concentration gradient of at least one of said main ingredient metals or copper in a wire radial direction, wherein the concentration gradient is defined as an extent of change of concentration in the radial direction of 10 mol % per μm or more.
2. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that at least one of said main ingredient metals has a concentration gradient both increasing and decreasing in the wire radial direction.
3. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said surface covering layer further has a single metal region selected from gold, palladium, platinum, rhodium, silver, and nickel at its surface side.
4. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said surface covering layer further has a single metal region selected from gold, palladium, platinum, rhodium, silver, and nickel inside it.
5. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said surface covering layer has a surfacemost region comprised of copper alone or an alloy containing 30 mol % or more copper at its surface side, and said surface covering layer has a region where at least one main ingredient metal and copper have concentration gradients both increasing and decreasing in the wire radial direction in the wire radial direction.
6. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said surface covering layer has a surfacemost region comprised of an alloy containing two or more metals selected from gold, palladium, platinum, rhodium, silver, and nickel in a uniform concentration of 0.1 mol % or more at its surface side, and said surface covering layer further has a concentration gradient of at least one main ingredient metal and copper in the wire radial direction.
7. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said surface covering layer contains an intermetallic compound phase inside it.
8. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said core material having copper as its main ingredient contains one or more elements selected from Ca, Sr, Be, Al, and rare earth elements in a total of 1 to 300 mass ppm.
9. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said core material having copper as its main ingredient contains one or more metals selected from silver, tin, and gold in a total of 0.1 to 10 mass %.
10. A bonding wire for a semiconductor device as set forth in claim 1 , characterized in that said surface covering layer has a surfacemost region comprised of a concentration gradient layer.
11. A bonding wire for a semiconductor device as set forth in claim 10 , characterized in that said surface covering layer further comprises a single metal region comprised of one main ingredient metal and said surface covering layer further comprises a concentration gradient layer on the inside of the single metal region.
12. A bonding wire for a semiconductor device as set forth in claim 1 , 2 or 10 , characterized in that said surface covering layer has a concentration gradient layer comprised of copper and two main ingredient metals.
13. A bonding wire for a semiconductor device as set forth in claim 12 , characterized in that said surface covering layer has a thickness of 0.02-0.8 μm.
14. A bonding wire for a semiconductor device as set forth in claim 1 , 2 , 10 or 11 , wherein the two or more main ingredient metals are selected from gold, palladium, and silver.
15. A bonding wire for a semiconductor device as set forth in claim 14 , characterized in that said surface covering layer has a thickness of 0.02-0.8 μm.
16. A bonding wire for a semiconductor device as set forth in claim 1 , 2 , 10 , or 11 , characterized in that said surface covering layer has a thickness of 0.02-0.8 μm.