Internal gear pump
View Patent ↗There have been demands for transparent electrode materials and magnetic materials, each having a wide range of applications. In view of the situations, a novel functional device and a method for forming an oxide material are provided. A functional device includes an Al x Ga y In z N layer (wherein 0≦x≦1, 0≦y≦1, and 0≦z≦1) and an oxide material layer composed of a metal oxide and formed on the Al x Ga y In z N layer. The metal oxide may be TiO 2 . The present invention provides a functional device that includes a group III nitride layer having excellent physical and chemical properties and a film integrally formed thereon. The film reflects less light at the interface and has chemical resistance and high durability.
1. A functional device, comprising:
an Al x Ga y In z N layer (wherein 0≦x≦1, 0 ≦y≦1, and 0≦z≦1); and
a thin film electrode of a metal oxide formed on the Al x Ga y In z N layer,
wherein the metal oxide is Ti 1-p Nb p O 2 (wherein 0.01≦p≦0.2) and has a transmittance of at least 80% for wavelength in a range of 400 to 800 nm and a resistivity in an order of 10 −4 Ω.cm at room temperature.
2. The functional device according to claim 1 , wherein the metal oxide comprises Anatase.
3. The functional device according to claim 1 , wherein the oxide material layer comprises a single-phase film.
4. The functional device according to claim 1 , wherein the oxide material layer comprises an epitaxial film.
5. The functional device according to claim 1 , wherein the functional device comprises a light-emitting element.
6. The functional device according to claim 1 , wherein the functional device comprises a high-frequency device.
7. The functional device according to claim 1 , wherein 0.01≦p≦0.06.
8. The functional device according to claim 1 , wherein said Al x Ga y In z N layer is a GaN layer.