Automated Sputtering Target Production
A system and method are provided for manufacturing a sputtering target. The system is preferably automated. Sub systems of the manufacturing system include a robotic part handling sub system, a weighing sub system adapted to measure the weight of a part to be manufactured into a sputtering target, and a machining sub system adapted to finish machine a part to be manufactured into a sputtering target. The system can further include a cleaning sub system adapted to clean a part to be manufactured into a sputtering target, an inspection sub system adapted to measure dimensions of a part to be manufactured into a sputtering target, and a feedback control sub system adapted to provide control signals to one or more of the robotic handling sub system, the weighing sub system, the cleaning sub system, and the inspection sub system to control processing performed by one or more of the sub systems.
1 . An automated system for manufacturing a sputtering target.
2 . A system for manufacturing a sputtering target, comprising:
a robotic part handling sub system;
a weighing sub system adapted to measure the weight of a part to be manufactured into a sputtering target;
a machining sub system adapted to finish machine a part to be manufactured into a sputtering target;
a cleaning sub system adapted to clean a part to be manufactured into a sputtering target;
an inspection sub system adapted to measure dimensions of a part to be manufactured into a sputtering target; and
a feedback control sub system adapted to provide control signals to one or more of the robotic part handling sub system, the weighing sub system, the cleaning sub system, and the inspection sub system to control processing performed by one or more of the sub systems.
3 . The system of claim 2 , further including:
a computer numerically controlled machining sub system adapted to finish machine one or more surfaces of a semi-finished part to be manufactured into a sputtering target.
4 . The system of claim 2 , wherein the robotic part handling sub system comprises a six axis, modular, electric, servo-driven robot.
5 . The system of claim 1 , wherein the robotic part handling sub system comprises a single carriage, heavy duty, floor-mount robot transport unit.
6 . The system of claim 5 , wherein the robotic part handling sub system further comprises a six axis, modular, electric, servo-driven robot, the robot transport unit transporting the six axis, modular, electric, servo-driven robot.
7 . The system of claim 1 , further comprising a product load station, wherein parts to be manufactured into sputtering targets are staged and mounted in fixtures adapted to hold the parts during further processing.
8 . The system of claim 7 , wherein the product load station comprises seven universal part fixtures, each adapted to hold a part to be manufactured into a sputtering target.
9 . The system of claim 7 , wherein the product load station comprises a floor supported bridge crane.
10 . The system of claim 7 , wherein the product load station comprises a vacuum lifting mechanism.
11 . The system of claim 1 , wherein the weighing sub system is adapted to compare the actual measured weight of a part to be manufactured into a sputtering target with an expected weight for the part as stored in the feedback control sub system.
12 . The system of claim 11 , wherein the weighing sub system further includes a marking device adapted to mark a part to be manufactured into a sputtering target.
13 . The system of claim 1 , wherein the cleaning sub system comprises a degreasing, cleaning, and drying station.
14 . The system of claim 1 , further including a grit blast station adapted to etch at least a portion of a part to be manufactured into a sputtering target.
15 . The system of claim 1 , further including a coating station adapted to coat at least a portion of a part to be manufactured into a sputtering target.
16 . The system of claim 1 , further including a secondary cleaning sub system, the secondary cleaning sub system comprising one or more stations that are provided in a zone separate from a zone that includes the weighing sub system, the cleaning sub system, and the inspection sub system.
17 . The system of claim 16 , wherein the secondary cleaning sub system comprises an ultrasonic cleaning station, and a nitrogen clean room station.
18 . The system of claim 16 , wherein a secondary automatic part handling sub system is provided for transferring a part to be manufactured into a sputtering target to and/or between one or more of the ultrasonic cleaning station and the nitrogen clean room station.
19 . A method of manufacturing a sputtering target, comprising:
gripping a part to be manufactured into a sputtering target using a robotic part handling apparatus;
weighing the part and comparing the actual weight of the part to an expected weight, determining whether further processing of the part should be performed based on the results of comparing the actual weight to the expected weight;
finish machining the part to desired dimensions;
cleaning the finish machined part; and
inspecting the finish machined part to determine conformance of the dimensions of the finish machined part with desired dimensions.
20 . The method of claim 19 , further including leak testing the finish machined and cleaned part.
21 . The method of claim 19 , further including grit blasting at least a portion of the part to be manufactured into a sputtering target.
22 . The method of claim 19 , further including moving the finish machined and cleaned part to a secondary cleaning station wherein further cleaning is performed including one or more of deionized water cleaning and rinsing, ultrasonic cleaning, and filtered air blow drying.
23 . The method of claim 19 , further including:
providing a system controller;
providing an input signal to the system controller indicative of the presence of a part at a desired location for further processing including one or more of gripping the part, weighing the part, finish machining the part, and cleaning the part; and
performing the one or more processing operations upon receiving a control signal from the system controller based on receipt by the system controller of the input signal indicative of the presence of the part.