Gold wire for connecting semiconductor chip
View Patent ↗Gold wire for connecting a semiconductor chip basically containing praseodymium in 0.0004 mass % to 0.02 mass % in range and, considering the bonding characteristics, containing beryllium or aluminum or both in limited ranges and, considering the precipitates formed in the gold wire, further containing auxiliary additive elements of calcium, lanthanum, cerium, neodymium, and samarium in limited ranges.
1. A bonding wire for connecting a semiconductor chip to an external metal terminal, said bonding wire consisting essentially of 0.0004 mass % to 0.02 mass % of praseodymium, 0.0003 mass % to 0.006 mass % of indium, 0.0002 mass % to 0.02 mass % of calcium, with the balance gold, wherein the content of praseodymium constitutes, by mass ratio, 15% or more of the total content of calcium and praseodymium, and wherein in any cross-section in the bonding wire, number of pieces of precipitates comprising 10 atomic % or more of rare earth element and the balance being gold having a length of 0.5 μm or more is 10/mm 2 or less.
2. A bonding wire for connecting a semiconductor chip to an external metal terminal, said bonding wire consisting essentially of 0.0004 mass % to 0.02 mass % of praseodymium, 0.0003 mass % to 0.006 mass % of indium, 0.0002 mass % to 0.02 mass % of calcium, and at least one element of:
0.0002 mass % to 0.0033 mass % of cerium,
0.0002 mass % to 0.0033 mass % of neodymium,
0.0002 mass % to 0.0033 mass % of samarium,
0.0002 mass % to 0.003 mass % of lanthanum, and
0.0002 mass % to 0.003 mass % of europium,
with the balance gold, wherein the content of praseodymium constitutes, by mass ratio, 15% or more of total content of the calcium and rare earth elements, said rare earth elements indicating lanthanide elements including praseodymium and yttrium, and wherein in any cross-section in the bonding wire, number of pieces of precipitates comprising 10 atomic % or more of rare earth element and the balance being gold having a length of 0.5 μm or more is 10/mm 2 or less.
3. A bonding wire for connecting a semiconductor chip to an external metal terminal as set forth in claim 1 or 2 , characterized in that a content of rare earth elements other than praseodymium, cerium, neodymium, samarium, lanthanum, and europium is 0.0005 mass % or less.
4. A bonding wire for connecting a semiconductor chip to an external metal terminal as set forth in claim 1 or 2 , characterized by further containing at least one of 0.0002 mass % to 0.0009 mass % of beryllium and 0.0002 mass % to 0.005 mass % of aluminum.
5. A bonding wire for connecting a semiconductor chip to an external metal terminal as-set forth in claim 1 or 2 , characterized in that the unavoidable impurities of silicon, lead, lithium, and sodium are 0.0014 mass % or less.
6. A bonding wire for connecting a semiconductor chip to an external metal terminal as set forth in claim 1 or 2 , characterized in that the breakage strength is 210 MPa or more.
7. A bonding wire for connecting a semiconductor chip to an external metal terminal as set forth in claim 1 or 2 , characterized in that a rate of reduction in cross-section from an ingot in cast state is 98% or more.
8. A bonding wire for connecting a semiconductor chip to an external metal terminal as set forth in claim 7 , characterized in that said ingot is an ingot obtained by a one-directional solidification method.