Liquid crystal display and manufacturing method therefor
View Patent ↗A liquid crystal display 10 of the invention has a transparent substrate 11 on which are provided multiple signal lines 17 , scan lines 16 and auxiliary capacity lines 18 , plus TFTs and pixel electrodes 20 that are electrically coupled to the TFTs' drain electrodes D. The auxiliary capacity lines 18 are formed with an Al—Nd alloy layer coated with a layer of molybdenum. Each pixel region, except for the auxiliary capacity lower electrode 18 a on the auxiliary capacity line 18 , is coated over by a first insulating film 25 and by a second insulating film 26 that is thinner than the first insulating film 25 . Further, the auxiliary capacity lower electrodes 18 a are coated over by the second insulating film 26 , and auxiliary capacity upper electrodes 18 b are provided on the surface of the second insulating film 26 at the auxiliary capacity lower electrodes 18 a . Thanks to such structure, a small-pixel-area or high-definition liquid crystal display, and manufacturing method therefor, can be provided whereby short circuits in the regions forming the auxiliary capacity are few, the auxiliary capacity is large, and display irregularities such as crosstalk or flicker are satisfactorily curbed.
1. A method for manufacturing a liquid crystal display that includes:
multiple signal lines and multiple scan lines deployed as matrices on a transparent substrate;
pixel regions composed of areas delimited by the signal lines and scan lines;
multiple auxiliary capacity lines provided parallel to the scan lines, each in an individual pixel region and equipped with an auxiliary capacity electrode portion;
thin film transistors provided in each pixel region; and
pixel electrodes that are electrically coupled to the drain electrodes of the thin film transistors;
the method comprising:
forming on the transparent substrate, by means of a layer of aluminum or aluminum alloy coated with a layer of molybdenum, the gate electrodes of the thin film transistors, the scan lines that couple with the gate electrodes, and the auxiliary capacity lines;
forming a first insulating film so as to cover the entire surface of the transparent substrate;
removing via plasma etching the first insulating film present at the auxiliary capacity electrode portions;
forming a second insulating film so as to cover the entire surface of the transparent substrate;
forming a semiconductor layer on the surface of the second insulating film so as to coat the upper portions of the gate electrodes;
forming on the surface of the second insulating film: source electrodes for the thin film transistors, signal lines that couple with the source electrodes, drain electrodes for the thin film transistors, and auxiliary capacity upper electrodes positioned over the auxiliary capacity electrode portions; and
forming a pixel electrode in each pixel region.
2. The liquid crystal display manufacturing method according to claim 1 , wherein the combined thickness of the first insulating film and the second insulating film is determined at 2500 to 5500 Å, and the thickness of the second insulating film at 500 to 1500 Å.
3. The liquid crystal display manufacturing method according to claim 1 , wherein the auxiliary capacity upper electrodes are formed by extending the drain electrodes of the thin film transistor onto the second insulating film at the auxiliary capacity electrode portions.