Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same
View Patent ↗A sputtering apparatus includes a susceptor having a substrate and a plurality of target devices facing the substrate and substantially parallel to each other, each target device being rotatable.
1. A sputtering apparatus comprising:
a susceptor having a substrate; and
a plurality of target devices disposed forward of the substrate,
wherein the target devices include first to fifth targets,
wherein the first target device opposite to a center region of the substrate is fixed, and the second to fifth target devices opposite to a region between a first or second edge region and the center region of the substrate rotate, wherein the rotation angles of the second to fifth target devices increase from the center region to the edge region of the substrate,
wherein the second and third target devices are opposite to the region between the first edge region and the center region of the substrate, the third target device being nearer to the first edge region than the second target device, and the fourth and fifth target devices are opposite to the region between the second edge region and the center region of the substrate, the fifth target device being nearer to the second edge region than the fourth target device.
2. The sputtering apparatus according to claim 1 , wherein a total width of the target devices is smaller than a width of the substrate.
3. The apparatus according to claim 1 , wherein a width of each target device is smaller than a width of a gap between the target devices.
4. The apparatus according to claim 1 , wherein the rotation angle of the third target device is greater than the rotation angle of the second target device, and the rotation angle of the fifth target device is greater than the rotation angle of the fourth target device.
5. The apparatus according to claim 1 , wherein the second to fifth target devices rotate in substantially the same direction.
6. The apparatus according to claim 1 , wherein the second and third target devices and the fourth and fifth target devices rotate in substantially opposite directions.
7. The apparatus according to claim 1 , wherein each target device rotates in a random direction.
8. The apparatus according to claim 1 , wherein each target device rotates by a random rotation angle.
9. The apparatus according to claim 1 , wherein each target device rotates in groups, each group including at least two of the target devices, wherein the grouped target devices rotate in substantially the same direction.
10. The apparatus according to claim 9 , wherein the groups include a first group and a second group, the first group and the second group, adjacent to each other, rotate in substantially the same direction.
11. The apparatus according to claim 9 , wherein the first group and the second group, adjacent to each other, rotate in substantially opposite directions.
12. The apparatus according to claim 1 , wherein each target device rotates by substantially the same rotation angle.
13. The apparatus according to claim 1 , wherein each target device shifts in a direction substantially parallel to the substrate.
14. The apparatus according to claim 13 , wherein each target device shifts in a first direction or in a second direction from a center region of the substrate.