Semiconductor device with interface peeling preventing rewiring layer
View Patent ↗A semiconductor device which is capable of preventing interface peeling and a crack from occurring in the vicinity of the edge part of a rewiring layer is provided. The semiconductor device comprises a semiconductor substrate; a first interlayer insulation film (a first insulation film) which is formed on the semiconductor substrate, having a first aperture; a first rewiring layer which is formed, ranging from a part of the top surface of the first interlayer insulation film to the inside of the first aperture, and which uppermost surface has a size smaller than the size of the region surrounded by the outer periphery of the surface contacting with the first interlayer insulation film; and a second interlayer insulation film (a second insulation film) which is formed on the first rewiring layer and on the first interlayer insulation film.
1. A semiconductor device, comprising:
a semiconductor substrate;
a first insulation film formed on said semiconductor substrate and having a first aperture;
a first conductor film formed so as to range from a part of a top surface of said first insulation film to an inside of said first aperture;
a second conductor film formed of a plurality of stacked copper layers so as to completely cover top and side surfaces of the first conductor film, each of the copper layers having stepped portions at an outer edge portion thereof; and
a second insulation film formed on said second conductor film and on said first insulation film.
2. The semiconductor device of claim 1 , wherein said plurality of stacked copper layers include a bottommost copper layer and remaining copper layers, the bottommost copper layer completely covering the top and side surfaces of the first conductor film, each of the remaining copper layers completely covering top and side surfaces of an adjacent one of said plurality of stacked copper layers that is located immediately thereunder.
3. The semiconductor device of claim 1 , wherein an outer edge portion of said first conductor film is tapered.
4. The semiconductor device of claim 3 , wherein an edge which is formed of a top surface and a side surface of said first conductor film is rounded.
5. The semiconductor device of claim 1 , further comprising a metallic film formed between said first conductor film and said first insulation film, wherein said first conductor film is a metal plated film which is precipitated with said metallic film being used as a seed layer.
6. The semiconductor device of claim 1 , wherein said second insulation film has a second aperture for exposing a part of said second conductor film, and the device further comprises:
a rewiring layer formed on said second insulation film and inside of said second aperture, an outer edge portion of said rewiring layer being of one of a stepped shape, a tapered shape and a round shape, and
a sealing resin formed on said rewiring layer and on said second insulation film.