Method of fabricating liquid crystal display panel for coating liquid on substrate
An apparatus for fabricating a liquid crystal display panel includes a slit nozzle for applying a photo-resist liquid on a substrate, a nozzle driver for driving the slit nozzle, an air intake for inhaling air and/or impurities on the substrate through the slit nozzle before photo-resist is deposited on the substrate, and a gas supplier for supplying a gas through one or more channels in the slit nozzle to the substrate after the photo-resist is deposited on the substrate.
1. A method of fabricating a liquid crystal display panel containing a substrate, the method comprising:
inhaling gaseous matter on a surface of the substrate using an intake pipe of a slit nozzle, wherein the slit nozzle includes a first injection pipe for injecting a photo resist liquid, a second injection pipe for spraying a gas and the intake pipe for intaking the gaseous matter, is spaced from the substrate, wherein the intake pipe, the first injection pipe and the second injection pipe are sequentially arranged along a moving direction of the slit nozzle;
applying the photo resist liquid to the surface of the substrate through the first injection pipe of the slit nozzle while the slit nozzle is moving along a longitudinal direction of the substrate; and
spraying the gas on the photo resist liquid applied to surface of the substrate through the second injection pipe of the slit nozzle perpendicular to the surface of the substrate,
wherein the gas from the second injection pipe of the slit nozzle is sprayed on only the photo resist liquid applied on the surface of the substrate in a direction perpendicular to the surface of the substrate to prevent bubbles from being generated on the photo resist liquid applied to surface of the substrate, and
wherein the slit nozzle further comprises a third injection nozzle disposed adjacent to the second injection nozzle and spraying a gas onto the photo resist liquid applied to the surface of the substrate in an oblique direction with respect to the substrate.
2. The method according to claim 1 , further comprising removing the gaseous matter and supplying the gas from different channels in one nozzle.
3. The method according to claim 1 , further comprising mitigating formation of bubbles between the liquid and the surface of the substrate by removing the gaseous matter from an area of the surface shortly before the liquid is applied to the area.
4. The method according to claim 1 , wherein the gas comprises an inert gas.
5. The method according to claim 4 , wherein the inert gas is nitrogen.
6. The method according to claim 1 , further comprising removing a substantial amount of impurities on the surface of the substrate at the same time as inhaling the gaseous matter.