IP Library Granted Patent US 7,653,267
Granted Patent B2
US 7,653,267 · App. 11/801,289 · Granted Jan 26, 2010

Electro-optic modulator with adjustable cavity size

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Quick Facts
Patent No.
US 7,653,267
App. No.
11/801,289
Granted
Jan 26, 2010
Kind
B2
Abstract

A beam modulator ( 14 ) for modulating a beam ( 20 ) includes a modulator element ( 26 ) and a housing assembly ( 24 ). The modulator element ( 26 ) is positioned in the path of the beam ( 20 ). The housing assembly ( 24 ) retains the modulator element ( 26 ). Additionally, the housing assembly ( 24 ) defines a resonant cavity ( 328 ) with the modulator element ( 26 ) positioned therein. The housing assembly ( 24 ) includes a size adjuster ( 30 ) that can be moved to selectively adjust the size of the resonant cavity ( 328 ). As a result thereof, in certain embodiments, the resonant frequency of the beam modulator ( 14 ) can be easily tuned over a relatively large frequency range.

Claims (35)

1. A beam modulator for modulating a beam having a beam path, the beam modulator comprising:

a modulator element that is positioned in the beam path; and

a housing assembly that defines a resonant cavity with the modulator element positioned therein, the housing assembly including a size adjuster that can be used to selectively adjust the size of the resonant cavity without moving the modulator element.

2. The beam modulator of claim 1 wherein the housing assembly includes a housing base that cooperates with the size adjuster to define the resonant cavity, and wherein the size adjuster is moveable relative to the housing base to selectively adjust the size of the resonant cavity.

3. The beam modulator of claim 2 wherein the housing assembly includes an adjuster guide that guides the movement of the size adjuster.

4. The beam modulator of claim 3 wherein the modulator element is retained by the adjuster guide.

5. The beam modulator of claim 3 wherein the housing base includes a base aperture that allows for access to adjust the position of the size adjuster relative to the adjuster guide.

6. The beam modulator of claim 1 wherein size adjuster can be used to selectively adjust the size of the resonant cavity so that the resonant frequency of the resonant cavity can be adjusted at least approximately 0.5 GHZ.

7. The beam modulator of claim 1 wherein size adjuster can be used to selectively adjust the size of the resonant cavity so that the resonant frequency of the resonant cavity can be adjusted at least approximately 1 GHZ.

8. The beam modulator of claim 1 further comprising a modulator circuit that is electrically connected to the modulator element, the modulator circuit directing a voltage across the modulator element to change an index of refraction of the modulator element.

9. A precision apparatus including a beam source that generates a beam and the beam modulator of claim 1 positioned in the path of the beam.

10. A beam modulator for modulating a beam having a beam path, the beam modulator comprising:

a modulator element that is positioned in the beam path;

a modulator circuit that is electrically connected to the modulator element, the modulator circuit directing a voltage across the modulator element to change an index of refraction of the modulator element and to change the phase of the beam that passes through the modulator element; and

a housing assembly that retains the modulator element and that defines a resonant cavity with the modulator element positioned therein, the housing assembly including a housing base and a size adjuster that can be moved relative to the housing base to selectively adjust the size of the resonant cavity;

wherein the voltage across the modulator element does not move the size adjuster.

11. The beam modulator of claim 10 wherein the housing assembly includes an adjuster guide that guides the movement of the size adjuster.

12. The beam modulator of claim 10 wherein the housing base includes a base aperture that allows for access to adjust the position of the size adjuster relative to the adjuster guide.

13. The beam modulator of claim 10 wherein size adjuster can be used to selectively adjust the size of the resonant cavity so that the resonant frequency of the resonant cavity can be adjusted at least approximately 0.5 GHZ.

14. The beam modulator of claim 10 wherein size adjuster can be used to selectively adjust the size of the resonant cavity so that the resonant frequency of the resonant cavity can be adjusted at least approximately 1 GHZ.

15. A precision apparatus including a beam source that generates a beam and the beam modulator of claim 10 positioned in the path of the beam.

16. A method for modulating a beam, the method comprising the steps of:

positioning a modulator element in a resonant cavity; and

selectively adjusting the size of the resonant cavity to tune the resonant frequency of the resonant cavity without moving the modulator element.

17. The method of claim 16 wherein the step of positioning includes the steps of providing a housing assembly that includes a housing base and a size adjuster, and wherein the step of selectively adjusting includes the step of moving the size adjuster relative to the rest of the housing base.

18. The method of claim 17 wherein the step of selectively adjusting the size includes adjusting the size so that the resonant frequency of the resonant cavity is adjusted at least approximately 0.5 GHZ.

19. The method of claim 17 wherein the step of selectively adjusting the size includes adjusting the size so that the resonant frequency of the resonant cavity is adjusted at least approximately 1 GHZ.

20. The beam modulator of claim 1 wherein at least a portion of the modulator element is spaced apart from the housing assembly.

21. The beam modulator of claim 1 wherein the modulator element changes the phase of the beam that passes through the modulator element.

22. The beam modulator of claim 10 wherein at least a portion of the modulator element is spaced apart from the housing assembly.

23. A beam modulator for modulating a beam having a beam path, the beam modulator comprising:

a modulator element that is positioned in the beam path;

a modulator circuit that is electrically connected to the modulator element, the modulator circuit directing a voltage across the modulator element to change an index of refraction of the modulator element and to change the phase of the beam that passes through the modulator element; and

a housing assembly that retains the modulator element and that defines a resonant cavity with the modulator element positioned therein, the housing assembly including a housing base and a size adjuster that can be moved relative to the housing base to selectively adjust the size of the resonant cavity;

wherein the size adjuster can selectively adjust the size of the resonant cavity without moving the modulator element.

Assignments (10)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →