Method of depositing materials on a non-planar surface
View Patent ↗A method of depositing materials on a non-planar surface is disclosed. The method is effectuated by rotating non-planar substrates as they travel down a translational path of a processing chamber. As the non-planar substrates simultaneously rotate and translate down a processing chamber, the rotation exposes the whole or any desired portion of the surface area of the non-planar substrates to the deposition process, allowing for uniform deposition as desired. Alternatively, any predetermined pattern is able to be exposed on the surface of the non-planar substrates. Such a method effectuates manufacture of non-planar semiconductor devices, including, but not limited to, non-planar light emitting diodes, non-planar photovoltaic cells, and the like.
1. A method of semiconductor processing onto a substrate, comprising:
a. providing a semiconductor process chamber having an ingress and an egress, wherein the ingress and egress are operable to allow passage of at least one substrate therethrough;
b. moving the at least one substrate down a translational path through the semiconductor process chamber;
c. rotating the at least one substrate as the substrate moves down the translational path through the semiconductor process chamber; and
d. performing a semiconductor process on the at least one substrate concurrently with the rotation of the at least one substrate down the translational path such that at least a portion of the surface area of the at least one substrate is exposed to the semiconductor process.
2. The method of claim 1 wherein the substrate is non-planar.
3. The method of claim 1 wherein a path between the ingress and egress is the translational path.
4. The method of claim 1 wherein the at least one substrate is loaded on a tray with a plurality of other substrates for increased throughput.
5. The method of claim 1 wherein a rate of rotation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
6. The method of claim 1 wherein a rate of translation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
7. The method of claim 1 wherein the semiconductor process is any among a list comprised of sputter deposition, reactive sputter deposition and evaporation deposition.
8. The method of claim 1 wherein the semiconductor process chamber comprises a deposition chamber.
9. The method of claim 1 wherein the rotation comprises rotating the at least one substrate about a lengthwise axis.
10. A method of forming a semiconductor device, comprising:
a. providing a semiconductor process chamber having an ingress and an egress, wherein the ingress and egress are operable to allow passage of at least one non- planar substrate therethrough;
b. moving the at least one non-planar substrate through the semiconductor process chamber, wherein moving comprises:
i. rotating the at least one non-planar substrate; and
ii. translating the non-planar substrate down a translational path through the semiconductor process chamber; and
c. concurrently while moving the at least one non-planar substrate through the semiconductor process chamber, depositing a layer of semiconductor material on the non-planar substrate, the layer encompassing at least 75% of a circumference of the at least one non-planar substrate.
11. The method of claim 10 wherein a path between the ingress and egress is the translational path.
12. The method of claim 10 wherein the at least one non-planar substrate is loaded on a tray with a plurality of other non-planar substrates for increased throughput.
13. The method of claim 10 wherein a rate of rotation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
14. The method of claim 10 wherein a rate of translation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
15. The method of claim 10 wherein the semiconductor process chamber comprises a deposition chamber.
16. The method of claim 10 wherein the rotation comprises rotating the at least one non-planar substrate about a lengthwise axis.
17. A method of depositing material on a non-planar surface, comprising:
a. providing a deposition chamber having an ingress and an egress, wherein the ingress and egress are operable to allow passage of at least one non-planar substrate therethrough;
b. moving the at least one non-planar substrate down a translational path through the deposition chamber; and
c. rotating the at least one non-planar substrate as the non-planar substrate moves down the translational path through the deposition chamber; and,
d. performing at least one semiconductor deposition on the at least one non-planar substrate concurrently with the rotation of the at least one non-planar substrate down the translational path such that at least a portion of the surface area of the at least one non-planar substrate is exposed to the semiconductor deposition.
18. The method of claim 17 wherein a path between the ingress and egress is the translational path.
19. The method of claim 17 wherein the at least one non-planar substrate is loaded on a tray with a plurality of other non-planar substrates for increased throughput.
20. The method of claim 17 wherein a rate of rotation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
21. The method of claim 17 wherein a rate of translation is determined as a function of variables from among a list comprised of type and process temperature, deposited material, desired deposition thickness, ambient temperature within the process chamber, quality of a vacuum condition within the process chamber and desired deposition area.
22. The method of claim 17 wherein the rotation comprises rotating the at least one non-planar substrate about a lengthwise axis.