Thin film transistor, method of fabricating the same, and method of fabricating liquid crystal display device having the same
View Patent ↗A thin film transistor includes a gate electrode, a gate insulation layer on the gate electrode, source and drain electrodes formed on the gate insulation layer, a polysilicon channel layer overlapping the ohmic contact layers and on the gate insulation layer between the source and drain electrodes, ohmic contact regions over the source and drain electrodes for contacting the polysilicon channel to the source and drain electrodes, and doping layers over the source and drain electrodes.
1. A method of forming a thin film transistor comprising:
forming a gate electrode on a substrate;
forming a gate insulation layer on the gate electrode;
forming source and drain electrodes on the gate insulation layer;
forming doping layers over the source and drain electrodes; and
providing a liquid-phase silicon layer over and in between the source and drain electrodes on the doping layers through a coating process; and
annealing the liquid-phase silicon layer to form a polysilicon channel layer and ohmic contact regions for contacting the polysilicon channel layer to the source and drain electrodes,
wherein the doping layers are is one of phosphor-silicate-glass and boro-silicate glass.
2. The method of forming a thin film transistor according to claim 1 , wherein the coating process is an inkjet method.
3. The method of forming a thin film transistor according to claim 1 , wherein the annealing process includes using a laser.
4. The method of forming a thin film transistor according to claim 3 , wherein the annealing process includes heating the substrate up to a temperature of 200-800° C.
5. The method of forming a thin film transistor according to claim 1 , wherein the liquid-phase silicon layer includes CyclopentaSilane.
6. The method according to claim 1 , wherein the ohmic contact regions are formed by diffusing the doping layers into the liquid-phase silicon layer.