Granted Patent B1

US 8,072,705 · App. 11/803,071 · Granted Dec 6, 2011

Abstract

Claims (39)

1. A method for providing a magnetic writer comprising;

providing a bottom antireflective coating (BARC) on a portion of the magnetic writer having a reflectivity, the BARC having a low reflectivity, the low reflectivity being less than the reflectivity;

providing a barrier layer residing on at least a portion of the BARC, the barrier layer chemically isolating the at least the portion of the BARC from at least one structure above the barrier layer and from exposure to an ambient; and

providing a structure on at least a portion of the barrier layer, wherein the barrier layer has a thickness of not more than forty Angstroms.

2. The method of claim 1 wherein the barrier layer is configured to increase the low reflectivity of the BARC such that a total reflectivity does not exceed a desired reflectivity.

3. The method of claim 1 wherein the barrier layer is configured to increase the low reflectivity of the BARC such that a total reflectivity is not more than twenty percent.

4. The method of claim 1 wherein the barrier layer step of providing the barrier layer further includes:

providing a silicon layer.

5. The method of claim 4 wherein the step of providing the barrier layer further includes:

allowing at least a portion of the silicon layer to oxidize to form silicon oxide.

6. The method of claim 5 wherein the step of providing the barrier layer further includes:

depositing the silicon layer having a thickness, the thickness being sufficient such that the silicon oxide isolates the at least the portion of the BARC from exposure to an ambient.

7. The method of claim 1 wherein the barrier layer further includes a silicon dioxide layer.

8. The method of claim 1 wherein the barrier layer has a thickness of at least a monolayer.

9. The method of claim 1 wherein the mask has a trench therein, the trench having non-perpendicular sidewalls and wherein the method further includes:

providing a perpendicular magnetic pole in the trench.

10. The method of claim 9 further comprising:

removing an exposed portion of the barrier layer and an exposed portion of the BARC in the trench prior to providing the perpendicular magnetic recording pole.

11. The method of claim 9 wherein the portion of the magnetic writer includes a seed layer.

12. The method of claim 1 wherein the BARC providing further includes:

providing a silicon nitride antireflective layer.

13. The method of claim 1 wherein the mask has at least one trench therein and wherein the method further includes:

depositing at least one conductive line within the trench.

14. A magnetic writer comprising;

a bottom antireflective coating (BARC) on a portion of the magnetic writer having a reflectivity, the BARC having a low reflectivity, the low reflectivity being less than the reflectivity;

a barrier layer residing on at least a portion of the BARC, the barrier layer chemically isolating the at least the portion of the BARC from at least one structure above the barrier layer and from exposure to an ambient; and

a structure on at least a portion of the barrier layer;

wherein the barrier layer has a thickness of not more than forty Angstroms.

15. The magnetic writer of claim 14 wherein the structure is a conductive line.

16. The magnetic writer of claim 14 wherein the barrier layer is configured to increase the low reflectivity of the BARC such that a total reflectivity does not exceed a desired reflectivity.

17. The magnetic writer of claim 16 wherein the barrier layer further includes silicon oxide.

18. The magnetic writer of claim 17 wherein the barrier layer further has a thickness the thickness being sufficient such that the silicon oxide isolates the at least the portion of the BARC from exposure to the ambient.

19. The magnetic writer of claim 14 wherein the barrier layer is configured to increase the low reflectivity of the BARC layer such that a total reflectivity is not more than twenty percent.

20. The magnetic writer of claim 14 wherein the barrier layer has a thickness of at least a monolayer.

21. A magnetic writer comprising;

a bottom antireflective coating (BARC) on a portion of the magnetic writer, the BARC having a low reflectivity;

a barrier layer residing on at least a portion of the BARC, the barrier layer chemically isolating the at least the portion of the BARC from at least one structure above the barrier layer and from exposure to an ambient; and

a structure on at least a portion of the barrier layer;

wherein the BARC further includes silicon nitride.

Assignments (9)