Method for fabricating semiconductor device and semiconductor device
View Patent ↗An n-channel MOS transistor and a p-channel MOS transistor are formed on a semiconductor substrate 100 . The p-channel MOS transistor includes a gate electrode 102 a , a first offset sidewall 103 a formed on side surfaces of the gate electrode 102 a so as to contain fine particles 110 of group IV semiconductor therein. The n-channel MOS transistor includes a gate electrode 102 b and a second offset sidewall 103 b formed on side surfaces of the gate electrode 102 b . After ion implantation of group IV semiconductor, heat treatment is performed to form the fine particles 110 , so that a thickness of the first offset sidewall 103 a can be made larger than a thickness of the second offset sidewall 103 b.
1. A semiconductor device comprising:
a semiconductor substrate;
a first MOS transistor including a first gate insulation film formed on a first region of the semiconductor substrate, a first gate electrode formed on the first gate insulation film, a first sidewall formed of an insulating material on each side surface of the first gate electrode, fine particles of group IV semiconductor crystal implanted at least in part of the first sidewall and a first impurity doped region of a first conductivity type formed in part of the first region located at a side of the first gate electrode and the first sidewall; and
a second MOS transistor including a second gate insulation film formed on a second region of the semiconductor substrate, a second gate electrode formed on the second gate insulation film, a second sidewall formed of an insulating material on each side surface of the second gate electrode so as to have a smaller thickness than a thickness of the first sidewall and a second impurity doped region of a second conductivity type formed in part of the second region located at a side of the second sidewall.
2. The semiconductor device of claim 1 , wherein the first sidewall includes a first offset sidewall formed on each side surface of the first gate electrode so as to contain the fine particles implanted therein and a first doped region formation sidewall formed on a side surface of the first offset sidewall,
the second sidewall includes a second offset sidewall formed on each side surface of the second gate electrode and a second doped region formation sidewall formed on a side surface of the second offset sidewall,
the semiconductor device further includes a first extension region formed in each of parts of the semiconductor substrate located in both sides of the first gate electrode, respectively, and under the first offset sidewall so as to contain an impurity of a first conductivity type at a lower concentration than an impurity concentration of the first impurity doped region and a second extension region formed in each of parts of the semiconductor substrate located at both sides of the second gate electrode, respectively, and under the second offset sidewall so as to contain an impurity of a second conductivity type at a lower concentration than an impurity concentration of the second impurity doped region.
3. The semiconductor device of claim 2 , wherein each of the first offset sidewall and the second offset sidewall is formed of silicon oxide.
4. The semiconductor device of claim 1 , wherein the first sidewall includes a third offset sidewall formed on each side surface of the first gate electrode so as to contain the fine particles implanted therein, a third doped region formation sidewall formed on a side surface of the third offset sidewall and the semiconductor substrate so as to contain the fine particles implanted therein and have an L shape and a fourth doped region formation sidewall formed of a different material from a material of the third doped region formation sidewall on the third doped region formation sidewall,
the second sidewall includes a fourth offset sidewall formed on each side surface of the second gate electrode, a fifth doped region formation sidewall formed on a side surface of the fourth offset sidewall and the semiconductor substrate so as to have a smaller thickness than a thickness of the third doped region formation sidewall and an L shape and a sixth doped region formation sidewall formed of a different material from a material of the fifth doped region formation sidewall, and
the semiconductor device further includes a third extension region formed in each of parts of the semiconductor substrate located at both sides of the first gate electrode, respectively, and under the third offset sidewall so as to contain an impurity of a first conductivity type at a lower concentration than an impurity concentration of the first doped region and a fourth extension region formed in each of parts of the semiconductor substrate located at both sides of the second gate electrode, respectively, and under the fourth offset sidewall so as to contain an impurity of a second conductivity type at a lower concentration than an impurity concentration of the second impurity doped region.
5. The semiconductor device of claim 4 , wherein each of the third doped region formation sidewall and the fifth doped region formation sidewall is formed of silicon oxide, and
each of the fourth doped region formation sidewall and the sixth doped region formation sidewall is formed of silicon nitride.
6. The semiconductor device of claim 1 , wherein the fine particles are formed of at least one of Si crystal, SiGe mixed crystal and Ge crystal.
7. The semiconductor device of claim 1 , wherein surface portions of the fine particles are oxidized.
8. The semiconductor device of claim 1 , wherein the first MOS transistor is a p-channel MOS transistor and the second MOS transistor is an n-cannel MOS transistor.