Semiconductor device
View Patent ↗A semiconductor device comprises IC chips, each having semiconductor elements and pad regions, formed on a substrate, and conductor patterns for detecting displacement of a probe needle during a probing test of the IC chips. The conductor patterns each have an inner conductor and an outer conductor disposed in spaced-apart concentric relationship to one another, and the conductor patterns may be formed on the IC chips or on the substrate in a scribe region between adjacent IC chips. The distance between the inner and outer conductors is smaller than the size of the point or end tip of the probe needle. During a probing test, the probe needle is placed in contact with only the inner conductor, and slight displacement of the probe needle such that it moves into contact with both the inner and outer conductors during the probing test is detected by measuring an electricl characteristic between the two conductors so that corrective action can be taken.
1. A semiconductor device comprising:
a silicon substrate;
a plurality of IC chips each including a transistor and a pad region formed on the silicon substrate; and
a pattern for detecting displacement of a probe needle during a probing process, the pattern comprising an inner conductor and an outer conductor arranged at a distance from the inner conductor, the inner conductor and the outer conductor being concentric with each other, and the distance between the inner and outer conductors being smaller than a tip of the probe needle, whereby the pattern is able to detect if the probe needle is displaced into simultaneous contact with both the inner and outer conductors during the probing process.
2. A semiconductor device according to claim 1 , wherein the outer conductor is divided into a plurality of spaced-apart parts.
3. A semiconductor device according to claim 2 , wherein the inner conductor and the outer conductor divided into the plurality of parts are electrically connected to different pad regions, respectively.
4. A semiconductor device according to claim 1 , wherein a plurality of the patterns for detecting displacement are provided in a scribe region adjacent to the IC chips.
5. A semiconductor device according to claim 4 , wherein a pair of the patterns for detecting displacement are provided in each one of the IC chips.
6. A semiconductor device according to claim 4 , wherein a pair of the patterns for detecting displacement is provided per a group of the IC chips simultaneously measured in a probing process.
7. A semiconductor device according to claim 1 , wherein a pair of the patterns for detecting displacement are provided in each one of the IC chips.
8. A semiconductor device according to claim 1 , wherein the inner conductor and the outer conductor are electrically connected to different pad regions, respectively.
9. A semiconductor device comprising:
a plurality of IC chips formed on a substrate, each IC chip including semiconductor elements and pad regions; and
conductor patterns formed on the substrate or on the IC chips for detecting displacement of a probe needle during a probing test, each conductor pattern comprising an inner conductor and an outer conductor disposed in spaced-apart concentric relationship to one another with the inner and outer conductors spaced apart a distance smaller than a tip of the probe needle, whereby the conductor pattern is able to detect if the probe needle is displaced into simultaneous contact with both the inner and outer conductors during the probing test.
10. A semiconductor device according to claim 9 ; wherein the outer conductor comprises a plurality of spaced-apart conductor sections.
11. A semiconductor device according to claim 10 ; wherein the spaced-apart conductor sections define a circular shape.
12. A semiconductor device according to claim 11 ; wherein the inner conductor has a circular shape.
13. A semiconductor device according to claim 9 ; wherein the inner and outer conductors each have a circular shape.
14. A semiconductor device according to claim 9 ; wherein pairs of the conductor patterns are formed on a scribe region of the substrate adjacent to the IC chips.
15. A semiconductor device according to claim 9 ; wherein pairs of the conductor patterns are formed on each IC chip.