Semiconductor protective structure for electrostatic discharge
A semiconductor protective structure suitable for electrostatic discharge with a field-effect transistor, whose source forms an emitter, whose body forms a base, and whose drain forms a collector of a bipolar transistor. A plurality of drain regions are formed within a body region of the field-effect transistor, and the drain regions are connected to one another by a conductor.
1 . A semiconductor protective structure for electrostatic discharge (ESD) comprising:
a field-effect transistor, whose source forms an emitter, whose body forms a base, and whose drain forms a collector of a bipolar transistor; and
a plurality of drain regions having a substantially same conductivity type is formed within a body region of the field-effect transistor,
wherein the drain regions are connected to one another by a conductor.
2 . The semiconductor protective structure according to claim 1 , wherein a first drain region and a second drain region of the plurality of the drain regions are spaced from one another in a direction of a gate length of the field-effect transistor.
3 . The semiconductor protective structure according to claim 2 , wherein the first drain region is formed between a gate electrode and the second drain region, and wherein a conductive transition region is formed between the conductor and the first drain region closer to the second drain region than to the gate electrode.
4 . The semiconductor protective structure according to claim 1 , wherein two drain regions of the plurality of drain regions are spaced from one another in a direction of a gate width of the field-effect transistor.
5 . The semiconductor protective structure according to claim 1 , wherein the plurality of the drain regions are formed in a grid within the body region.
6 . The semiconductor protective structure according to claim 1 , wherein the field-effect transistor is formed as a closed structure, wherein a body terminal region of the body is formed in an outer area of the closed structure and the drain regions in an inner area of the closed structure.
7 . The semiconductor protective structure according to claim 6 , wherein the closed structure is ring-shaped or oval.
8 . The semiconductor protective structure according to claim 6 , wherein a PN junction between the body region and a source region is formed substantially completely around the closed structure.
9 . The semiconductor protective structure according to claim 1 , wherein a fixed potential is applied to a gate electrode of the field-effect transistor so that no conduction channel forms below the gate electrode.
10 . The semiconductor protective structure according to claim 1 , wherein a gate electrode of the field-effect transistor is connected conductively to the source and/or the body.
11 . The semiconductor protective structure according to claim 1 , wherein the field-effect transistor is isolated by a buried dielectric in a vertical direction and by a dielectric-filled trench structure in a lateral direction.