Method for fabricating a liquid crystal display device and an LCD device thereby
View Patent ↗A method for fabricating a LCD having enhanced aperture ratio and brightness includes: forming a gate line, a gate electrode, a common electrode and a common line in a first mask process; depositing a gate insulating layer covering the gate line, the gate electrode and the common electrode; forming an active layer on the gate insulating layer, and an ohmic contact layer on the active layer in a second mask process; forming a data line, a source electrode, and a drain electrode facing the source electrode in a third mask process; depositing a protective layer over the data line, the source electrode and the drain electrode; forming a pixel contact hole in a fourth mask process; and forming a pixel electrode, wherein the pixel electrode is connected to the drain electrode through the pixel contact hole in a fifth mask process using a reverse tapered photo-resist pattern.
1. A method for fabricating a liquid crystal display device, comprising:
forming a gate line, a gate electrode connected to the gate line, a common electrode and a common line connected the common electrode on a substrate in a first mask process;
depositing a gate insulating layer on the substrate to cover the gate line, the gate electrode and the common electrode;
forming an active layer on the gate insulating layer, the active layer overlapping the gate electrode to form a channel layer, and forming an ohmic contact layer on the active layer, a data line crossing with the gate line to define a pixel region and a source-drain pattern connected to the data line in a second mask process;
depositing a protective layer over the data line, the source electrode and the drain electrode;
patterning the source-drain pattern to form a source electrode and a drain electrode, completing the channel layer by removing a portion of the ohmic contact layer between the source electrode and the drain electrode, and forming a pixel contact hole exposing the drain electrode by penetrating the protective layer in a third mask process; and
forming a pixel electrode that generates a horizontal electric field with the common electrode in the pixel region, wherein the pixel connects electrode to the drain electrode through the pixel contact hole in a fourth mask process using a reverse tapered photo-resist pattern,
wherein the pixel electrode and the common electrode are formed in a zigzag shape while the data line is formed in a liner line shape,
wherein a conductive line patterns of the substrate such as the pixel electrode, the common electrode, the gate line and the data line are formed with the reverse tapered photo-resist pattern,
wherein at least one of the pixel electrode, common electrode, the gate lien, the data line and the common line has a line width of about 1.5˜4.0 μm.
2. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the reverse tapered photo-resist pattern is formed by steps of:
depositing photo-resist on the substrate;
baking the photo-resist with controlling temperature for the photo-resist pattern to have reverse tapered shape and;
exposing the photo-resist with adjusting defocus amount and exposure amount for patterning the photo-resist to have reverse tapered shape.