Beam recording method and device
A recording device including a beam deflection section for relatively moving an irradiation position of an exposure beam with respect to a substrate on which a resist layer is formed; a substrate velocity adjustment section for adjusting a moving velocity of the substrate based on a deflection amount of the exposure beam; and a deflection control section for controlling to change a deflection velocity of the exposure beam during exposure of the recording signals according to the moving velocity of the substrate.
1. A recording device for forming a latent image on a resist layer formed on a substrate by irradiating an exposure beam on the resist layer in accordance with recording signals while moving the substrate, comprising:
a beam deflection section for relatively moving an irradiation position of the exposure beam with respect to the substrate;
a deflection control section for performing control to change the deflection velocity of the exposure beam during exposure of the recording signals according to a moving velocity of the substrate,
a detector for detecting a deflection angle of the exposure beam when forming the latent image, and
a substrate velocity adjustment section for adjusting the moving velocity of the substrate based on a detected deflection angle detected by the detector.
2. The recording device according to claim 1 , further comprising a low pass filter circuit for extracting a frequency component that is not more than a high cut-off frequency for mechanical response of a substrate moving stage
wherein the substrate velocity adjustment section adjusts the moving velocity of the substrate according to the extracted frequency component.
3. The recording device according to claim 1 , further comprising a deflection angle determination unit for determining whether the deflection angle of the exposure beam exceeds a predetermined range, wherein the substrate velocity adjustment section switches the moving velocity of the substrate to a predetermined velocity when a determination is made that the deflection angle exceeds the predetermined range.
4. The recording device according to claim 1 , further comprising an estimation unit for estimating the deflection angle of the exposure beam based on the recording signals, wherein the substrate velocity adjustment section adjusts the moving velocity of the substrate based on an estimated value by the estimation unit.
5. The recording device according to claim 1 , further comprising a determination unit for determining whether the deflection angle of the exposure beam exceeds a predetermined range based on a pit length and space length of the recording signals, and an irradiation adjuster for interrupting the exposure beam and adjusting an irradiation start position of the exposure beam when judgment is made that the deflection angle exceeds the predetermined range.
6. The recording device according to claim 1 , wherein the substrate velocity adjustment section and the deflection control section increase the moving velocity of the substrate and the deflection velocity of the exposure beam, respectively, when the deflection angle of the exposure beam exceeds a predetermined value, the deflection angle being in the direction opposite to the direction of the movement of the substrate.
7. The recording device according to claim 1 , wherein the substrate is moved by rotating the substrate.
8. The recording device according to claim 1 , wherein a relative velocity of the substrate and the exposure beam is more than a predetermined value when forming the latent image.
9. A recording device for forming a latent image on a resist layer formed on a substrate by irradiating an exposure beam on the resist layer in accordance with recording signals while moving the substrate, comprising:
a beam deflection section for relatively moving an irradiation position of the exposure beam with respect to the substrate;
a deflection control section for performing control to change the deflection velocity of the exposure beam during exposure of the recording signals according to a moving velocity of the substrate,
a detector for detecting a deflection angle of the exposure beam on the basis of a duty ratio of the recording signal when forming the latent image, and
a substrate velocity adjustment section for adjusting the moving velocity of the substrate based on a detected deflection angle detected by the detector.
10. The recording device according to claim 9 , further comprising a duty ratio determination unit for determining a duty ratio of a pit of the recording signal, wherein the substrate velocity adjustment section switches the moving velocity of the substrate to a faster value when judgment is made that the duty ratio of the pit is less than a predetermined lower limit value, and switches the moving velocity of the substrate to a slower value when judgment is made that the duty ratio of the pit exceeds a predetermined upper limit value.
11. The recording device according to claim 9 , wherein the substrate velocity adjustment section and the deflection control section increase the moving velocity of the substrate and the deflection velocity of the exposure beam, respectively, when the deflection angle of the exposure beam exceeds a predetermined value, the deflection angle being in the direction opposite to the direction of the movement of the substrate.
12. The recording device according to claim 9 , wherein the substrate is moved by rotating the substrate.
13. The recording device according to claim 9 , wherein a relative velocity of the substrate and the exposure beam is more than a predetermined value when forming the latent image.
14. A recording method for forming a latent image on a resist layer formed on a substrate by irradiating an exposure beam on the resist layer in accordance with recording signals while moving the substrate, the method comprising steps of:
relatively moving an irradiation position of the exposure beam with respect to the substrate;
performing control to change the deflection velocity of the exposure beam during exposure of the recording signals according to a moving velocity of the substrate,
detecting a deflection angle of the exposure beam when forming the latent image, and
adjusting the moving velocity of the substrate based on a detected deflection angle detected in the detecting step.
15. The recording method according to claim 14 , wherein the adjusting step and the performing control step increase the moving velocity of the substrate and the deflection velocity of the exposure beam, respectively, when the deflection angle of the exposure beam exceeds a predetermined value, the deflection angle being in the direction opposite to the direction of the movement of the substrate.
16. The recording device according to claim 14 , wherein the substrate is moved by rotating the substrate.
17. The recording method according to claim 14 , wherein a relative velocity of the substrate and the exposure beam is more than a predetermined value when forming the latent image.
18. A recording method for forming a latent image on a resist layer formed on a substrate by irradiating an exposure beam on the resist layer in accordance with recording signals while moving the substrate, the method comprising steps of:
relatively moving an irradiation position of the exposure beam with respect to the substrate;
performing control to change the deflection velocity of the exposure beam during exposure of the recording signals according to a moving velocity of the substrate,
detecting a deflection angle of the exposure beam on the basis of a duty ratio of the recording signal when forming the latent image, and
adjusting the moving velocity of the substrate based on a detected deflection angle detected in the detecting step.
19. The recording method according to claim 18 , wherein the adjusting step and the performing control step increase the moving velocity of the substrate and the deflection velocity of the exposure beam, respectively, when the deflection angle of the exposure beam exceeds a predetermined value, the deflection angle being in the direction opposite to the direction of the movement of the substrate.
20. The recording device according to claim 18 , wherein the substrate is moved by rotating the substrate.
21. The recording method according to claim 18 , wherein a relative velocity of the substrate and the exposure beam is more than a predetermined value when forming the latent image.