Plasma Treating Apparatus, Electrode Member for Plasma Treating Apparatus, Electrode Member Manufacturing Method and Recycling Method
In a plasma treating apparatus for carrying out a plasma treatment by setting a plate-shaped work to be an object, an electrode member 46 to abut on a lower surface of the work is constituted by soldering a plate-shaped suction member 45 having a plurality of through holes 45 a formed thereon and a cooling plate 44 , and a sprayed film 65 obtained by spraying alumina is formed on an upper surface of the suction member 45 , and furthermore, an edge of a hole portion 45 d in which the through holes 45 a are formed is covered with the sprayed film 65 . Consequently, it is possible to reduce a consumption of the electrode member due to sputtering to prolong a lifetime, thereby decreasing a component consuming cost and preventing an inner part of the apparatus from being contaminated by a scattered substance.
1 . A plasma treating apparatus for carrying out a plasma treatment by setting a plate-shaped work to be an object, comprising:
a vacuum chamber;
a lower electrode provided in the vacuum chamber and having the work mounted thereon;
an upper electrode disposed above the lower electrode;
a processing space formed between the lower electrode and the upper electrode; and
plasma generating means for generating a plasma in the processing space,
wherein an electrode member to abut on a lower surface of the work in the lower electrode includes
a plate-shaped member on which a plurality of through holes is formed, and
a dielectric film formed by spraying a dielectric onto an upper surface of the plate-shaped member and taking such a shape as to cover an edge of a hole portion in which the through holes are formed on the upper surface of the plate-shaped member.
2 . An electrode member for a plasma treating apparatus for carrying out a plasma treatment by setting a plate-shaped work to be an object which is used in the plasma treating apparatus and abuts on a lower surface of the work in a lower electrode having the work mounted thereon, the electrode member comprising:
a plate-shaped member on which a plurality of through holes is formed, and
a dielectric film formed by spraying a dielectric onto an upper surface of the plate-shaped member and taking such a shape as to cover an edge of a hole portion in which the through holes are formed on the upper surface of the plate-shaped member.
3 . An electrode member manufacturing method of manufacturing an electrode member for a plasma treating apparatus for carrying out a plasma treatment by setting a plate-shaped work to be an object which is used in the plasma treating apparatus and abuts on a lower surface of the work in a lower electrode having the work mounted thereon, comprising:
a through hole forming step of forming a plurality of through holes on a plate-shaped member;
a spraying step of spraying a dielectric onto an upper surface of the plate-shaped member having the through holes formed thereon, thereby forming a dielectric film taking such a shape as to cover an edge of a hole portion in which the through holes are formed on the upper surface of the plate-shaped member; and
a surface polishing step of mechanically polishing a surface of the plate-shaped member having the dielectric film formed thereon.
4 . The electrode member manufacturing method according to claim 3 , wherein a cooling member taking an identical planar shape to a shape of the plate-shaped member is bonded to a lower surface of the plate-shaped member, and the dielectric is sprayed to cover a side end face of the plate-shaped member and a part of a side end face of the cooling member at the spraying step.
5 . An electrode member recycling method of reusing an electrode member which is used in a plasma treating apparatus for carrying out a plasma treatment by setting a plate-shaped work to be an object and is manufactured by a manufacturing method, comprising a through hole forming step of forming a plurality of through holes on a plate-shaped member, a spraying step of spraying a dielectric onto an upper surface of the plate-shaped member having the through holes formed thereon, thereby forming a dielectric film taking such a shape as to cover an edge of a hole portion in which the through holes are formed on the upper surface of the plate-shaped member, and a surface polishing step of mechanically polishing a surface of the plate-shaped member having the dielectric film formed thereon, the recycling method comprising:
a film removing step of removing the sprayed film of the spent electrode member, and
a respraying step of spraying a dielectric onto the upper surface of the plate-shaped member obtained after removing the sprayed film, thereby forming the dielectric film again.