Anodes for fluorine gas discharge lasers

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Quick Facts

Patent No.: US 7,851,011
App. No.: 11/818,022
Granted: Dec 14, 2010
Kind: B2

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Abstract

Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.

Claims (55)

1. A method for producing a gas discharge electrode discharge region pre-formed reef for an elongated gas discharge electrode for a gas discharge laser comprising a laser gas containing fluorine, comprising the steps of:

forming a reef template on at least the discharge region of the elongated gas discharge region;

selectively growing a porous layer of insulating material as dictated by the reef template.

2. The method of claim 1 further comprising:

using a positive reef template.

3. The method of claim 1 further comprising:

using a negative reef template.

4. The method of claim 2 further comprising:

the positive reef template comprises a pattern of depositions of a reef enhancing material on at least the discharge region.

5. The method of claim 3 further comprising:

the negative reef template comprises a pattern of depositions of reef inhibiting material on at least the discharge region.

6. The method of claim 4 further comprising:

the reef enhancing material is lead.

7. The method of claim 5 further comprising:

the reef inhibiting material is zinc.

8. The method of claim 4 further comprising:

the reef extend beyond the boundary of each respective deposition of reef enhancing material.

9. The method of claim 5 further comprising:

the reef grows over at least a portion of each respective deposition of reef inhibiting material.

10. The method of claim 4 further comprising:

the reef template is diffused into the surface of at least the discharge region.

11. The method of claim 5 further comprising:

the reef template is diffused into the surface of at least the discharge region.

12. The method of claim 6 further comprising:

the reef template is diffused into the surface of at least the discharge region.

13. The method of claim 7 further comprising:

the reef template is diffused into the surface of at least the discharge region.

14. The method of claim 8 further comprising:

the reef template is diffused into the surface of at least the discharge region.

15. The method of claim 9 further comprising:

the reef template is diffused into the surface of at least the discharge region.

16. The method of claim 10 further comprising: