Semiconductor device
View Patent ↗Provided is a semiconductor device, in which: patterns for detecting displacement at probing are formed of a plurality of minute conductors formed below a protective film; each of the plurality of minute conductors formed below the protective film is electrically insulated and formed to be smaller than a bottom surface of a tip of a probing needle used for carrying out an electrical measurement of IC chips; and the patterns for detecting displacement at probing are provided in a pair for each of the IC chips.
1. A semiconductor device, comprising:
a silicon substrate;
a plurality of IC chips each including a transistor and a pad region for probing, and disposed on the silicon substrate;
scribe regions adjacent to the plurality of IC chips; and
patterns for use in detecting displacement at a time of the probing provided in one of the scribe regions and the plurality of IC chips, the patterns comprising a plurality of minute conductors covered by a protective film to electrically isolate the plurality of minute conductors,
wherein each of the plurality of minute conductors is electrically insulated from one another and is smaller than a tip of a probing needle used to carry out the probing of the plurality of IC chips.
2. A semiconductor device according to claim 1 , wherein the patterns are provided in pairs respectively for each of the plurality of IC chips.
3. A semiconductor device according to claim 1 , wherein the patterns are provided in pairs respectively for each of groups of IC chips to be simultaneously probed in one probing process.