Electro-optical device and electronic apparatus
In at least one embodiment of the disclosure, an electro-optical device includes a peripheral circuit wiring arranged in a peripheral area located peripheral to a pixel area. The peripheral circuit wiring has overlapping portions that overlap vertical conduction terminals in plan view. The overlapping portions are arranged on a lower layer side relative to the vertical conduction terminals. An insulating film electrically insulates the overlapping portions of the peripheral circuit wiring from the vertical conduction terminals.
1. An electro-optical device comprising:
a counter substrate and an element substrate arranged so as to face each other;
liquid crystal in between the counter substrate and the element substrate;
a plurality of pixel electrodes arranged in a pixel area of the element substrate;
a counter electrode arranged between the liquid crystal and the counter substrate;
vertical conduction terminals arranged in a peripheral area located peripheral to the pixel area and which enable electrical conduction between the counter substrate and the element substrate;
peripheral circuit wiring arranged in the peripheral area, the peripheral circuit wiring having overlapping portions that overlap the vertical conduction terminals in plan view, the overlapping portions being arranged on a lower layer side relative to the vertical conduction terminals; and
lines and electronic elements which are arranged on a lower layer side relative to the pixel electrodes and are used for driving the pixel electrodes,
wherein the vertical conduction terminals are formed of a conductive film which is the same layer as a first conductive film selected from a plurality of conductive films forming the lines and the electronic elements, and
wherein the overlapping portions of the peripheral circuit wiring are formed of a conductive film which is the same layer as a second conductive film which is selected from the plurality of conductive films and arranged on a lower layer side relative to the first conductive film.
2. The electro-optical device according to claim 1 , wherein the first conductive film and the second conductive film are metal films.
3. The electro-optical device according to claim 1 ,
wherein the vertical conduction terminals are formed of films, each of which is the same layer as that forming each of the pixel electrodes, and
wherein each of the overlapping portions of the peripheral circuit wiring is formed of a conductive film the same as any one of conductive films forming the lines and the electronic elements.
4. The electro-optical device according to claim 1 , further comprising:
a counter-electrode potential line which is arranged in the peripheral area on the element substrate, to which a counter-electrode potential used to maintain the counter electrode at a predetermined potential is supplied, and which has connection portions electrically connected to at least the vertical conduction terminals, each of the connection portions being formed of the same layer as that forming each of the vertical conduction terminals.
5. The electro-optical device according to claim 1 , further comprising:
a counter-electrode potential line which is arranged in the peripheral area on the element substrate, to which a counter-electrode potential used to maintain the counter electrode at a predetermined potential is supplied, and which have connection portions electrically connected to at least the vertical conduction terminals, each of the connection portions being arranged on a lower layer side relative to the vertical conduction terminals,
wherein the connection portions of the counter-electrode potential line are electrically connected to the vertical conduction terminals through a contact hole which penetrates through an interlayer insulation film used for insulation between the connection portions and the vertical conduction terminals.
6. The electro-optical device according to claim 5 ,
wherein at least the connection portions of the counter-electrode potential line are arranged in a layer different from a layer including the overlapping portions of the peripheral circuit wiring.
7. The electro-optical device according to claim 6 ,
wherein at least the connection portions of the counter-electrode potential line are arranged in an upper layer side relative to the overlapping portions of the peripheral circuit wiring.
8. The electro-optical device according to claim 5 ,
wherein at least each of the connection portions of the counter-electrode potential line is made of a film which is the same layer as that selected from a plurality of conductive films used to form the lines and the electronic elements.
9. An electronic apparatus including an electro-optical device set forth in claim 1 .