Method for fabricating semiconductor device
View Patent ↗A method for fabricating a semiconductor device according to the present invention includes: a step for forming a wiring layer on a semiconductor substrate; a step for patterning the wiring layer; and a step for covering the wiring layer with a protective insulating film. Moreover, after the step for forming the wiring layer, all required heat treatment steps to be performed prior to the step for covering the wiring layer with the protective insulating film are performed at a temperature lower than a temperature for plastic deformation of the wiring layer.
1. A method for fabricating a semiconductor device comprising:
forming a wiring layer on a semiconductor substrate, the wiring layer being a multilayer structure including an aluminum or aluminum alloy layer;
patterning said wiring layer; and
covering said wiring layer with a protective insulating film, wherein all required heat treatment steps performed after said forming and prior to said covering are performed at a temperature lower than 150° C. and lower than a temperature for plastic deformation of said wiring layer, with the temperature for plastic deformation of said wiring layer being lower than a temperature for recrystallization of said wiring layer.
2. A method for fabricating a semiconductor device according to claim 1 , wherein a thickness of said wiring layer is 2 μm or more.
3. A method for fabricating a semiconductor device according to claim 1 , further comprising:
etching to perform patterning of said wiring layer; and removing a resist used for patterning of said wiring layer.
4. A method for fabricating a semiconductor device according to claim 1 , wherein said wiring layer is a top wiring layer.