Surface acoustic wave device
View Patent ↗To provide a manufacturing method for a surface acoustic wave device, which makes it possible to easily and reliably connect a piezoelectric element to a substrate having an external connection terminal, and a surface acoustic wave device capable of being made smaller using this manufacturing method. A surface acoustic wave device, having a first substrate which has a interdigital transducer and an electrode pad on one side; and a second substrate which has an external terminal, and a castellation formed on the side connected to the external terminal, wherein the surface of the second substrate opposite the surface on which the external terminal is formed is bonded by a bonding layer to the electrode pad, the first substrate is larger in size than the second substrate, and a part of the electrode pad, which extends outwardly of the second substrate, is connected to the castellation by a plating layer.
1. A surface acoustic wave device, comprising:
a first substrate, having an interdigital transducer and an electrode pad on a first surface of said first substrate; and
a second substrate, having an external terminal and a castellation formed on a side surface of the second substrate and connected to said external terminal,
wherein a second surface of said second substrate, opposite a third surface on which said external terminal is formed, is bonded by a bonding layer to said electrode pad of said first substrate,
said first surface of said first substrate on which said interdigital transducer is formed is larger than said second surface facing said first surface, and a part of said electrode pad of said first substrate is connected to said castellation by a plating layer; and
said part of said electrode pad that is connected to said castellation extends on said first surface and outside said second substrate.
2. The surface acoustic wave device according to claim 1 , wherein said plating layer is grown by an electrolytic plating method subsequent to mounting said second substrate on said first substrate, and electrically connects the part of said electrode pad of said first substrate, which extends outwardly of said second substrate, to said castellation.
3. The surface acoustic wave device according to claim 1 , wherein said bonding layer is a photosensitive material formed by an exposure and development method.
4. The surface acoustic wave device according to claim 3 , wherein said bonding layer is also a thermosetting material, which bonds said second substrate using a thermosetting method.