Method and system for conducting event-streamed spectrum imaging

1. A method for conducting event-streamed spectrum imaging, comprising:

generating an analog x, y raster scan over an area of interest on a sample with a scan generator to acquire pixel events from individual pixel positions;

concurrently, detecting a plurality of different types of signals from different signal sources from every pixel position which are generated by the scan from interaction of the raster scan with the sample, and with pluralities of different signals detected registered to every pixel position;

converting the detected signals into electronic data signals for every x, y position and scan frame from all signals generated by the scan;

formatting the electronic data signals into packets and streaming said packets over an interface to a host as an event stream; and

buffering and storing the event stream in the host for use in display of and processing of information acquired about the sample.

2. The method of claim 1 , wherein the packets are assembled as components, comprising:

start of stream components signaling the start of a stream, y position components including event data corresponding to specific y positions, x positions components including event data corresponding to specific x positions, and end of stream components for allowing signaling the end of the stream.

3. The method of claim 2 , wherein said x position components and y position components are configured for providing information about a spatial location indicating where the image pixel events have been collected.

4. The method of claim 2 , wherein said x position components and y position components are configured to include a frame number for providing information about a temporal location indicating when the image pixel events have been collected.

5. The method of claim 2 , wherein said y position components comprised live synchronization flags for signaling the host to start decoding upcoming event data as a new line in a frame, line identification and processing information including information for identifying upcoming event data and spatial and temporal position information from where decoding begins.

6. The method of claim 2 , wherein said x position components comprise x pixel position in x, y spatial coordinates and event data related to pixel position including data from sources.

7. The method of claim 2 , further comprising breaking a stream into multiple streams if more event data is acquired than a host can handle for a specific stream.

8. The method of claim 1 , wherein said plurality of different types of signals comprises secondary electrons, backscattered electrons, transmitted electrons, cathodoluminescence, x-rays, induced current, Auger electrons and ions.

9. The method of claim 1 , wherein said raster scan is an electron beam scan, ion beam scan or specimen stage scan.

10. A system for conducting event-streamed spectrum imaging, comprising:

means for generating an x, y raster scan over an area of interest on a sample with a scan generator to acquire pixel events from individual pixel positions;

means for concurrently detecting a plurality of different types of signals from different signal sources from every pixel position which are generated by interaction of a raster scan with a sample, and with pluralities of different signals registered to every pixel position;

means for converting detected signals into electronic data signals for every x, y position and scan frame from all signals generated by a scan;

means for formatting the electronic data signals into packets and for streaming the packets over an interface to a host as an event stream; and

means for buffering and storing the event stream in the host for use in display of and processing of information acquired about a sample.

11. The system of claim 10 , further comprising means for assembling said packets as components comprising:

start stream components for signaling the start of a stream;

y position components including event data corresponding to specific y positions; x position components including event data corresponding to specific x positions; and end of stream components for allowing signaling the end of a stream.

12. The system of claim 11 , wherein said x position components and y position components are configured for providing information about a spatial location indicating where the image pixel events have been collected.

13. The system of claim 11 , wherein said y position components comprise live synchronization flags for signaling the host to start decoding upcoming event data as a new line in a frame, line identification and processing information including information for identifying upcoming event data and spatial and temporal position information including spatial and temporal position information from where decoding begins.

14. The system of claim 11 , wherein said x position components comprise x pixel position in x, y spatial coordinates and event data related to pixel position including data from sources.

15. The system of claim 11 further comprising means for breaking a stream into multiple streams if more event data is acquired than a host can handle for a specific stream.

16. The system of claim 10 , wherein said scan generator is of a type wherein the different types of signals generated comprise secondary electrons, backscattered electrons, transmitted electrons, cathodoluminescence, x-rays, induced current, Auger electrons and ions.

17. The system of claim 10 , wherein said x position components and y position components are configured to include a frame number for providing information about a temporal location indicating when the image pixel events have been collected.

18. The system of claim 10 , wherein said means for generating an x, y raster scan comprises an electron beam scan, ion beam scan or specimen stage scan.