Automatic generation of PID parameters for a scanning probe microscope
View Patent ↗Linear PID controllers have a transfer function that resembles the frequency response of a notch filter. The PID parameters, K P , K I , and K D (proportional, integral, and derivative gains, respectively) can be extracted from the parameters of a linear notch filter. The linearized modes of scanning probe microscope (SPM) actuators have frequency responses that resemble those of simple second order resonance. Reasonable feedback control can be achieved by an inverse dynamics model of the resonance. A properly parameterized notch filter can cancel the dynamics of a resonance to give good closed-loop response.
1. A method for controlling a scanning probe microscope, the method comprising:
generating a scanning probe microscope model according to associated dynamics of the scanning probe microscope;
selecting filter parameters that shape selected dynamics of the scanning probe microscope model;
generating a notch filter using the filter parameters;
encoding the notch filter as PID parameters; and
implementing the PID parameters in a PID controller to control the scanning probe microscope.
2. A method for controlling a scanning probe microscope as in claim 1 , where the scanning probe microscope model is a continuous-time model.
3. A method for controlling a scanning probe microscope as in claim 1 , where the scanning probe microscope model is a sampled-data model.
4. A method as in claim 1 , further comprising, generating the scanning probe microscope model by:
measuring open loop frequency response measurement of the scanning probe microscope; and
extracting an open loop actuator model of the scanning probe microscope dynamics.
5. A method as in claim 1 , generating a model comprising:
measuring a closed loop frequency response of the scanning probe microscope; and
extracting an open loop actuator model of the scanning probe microscope dynamics.
6. A method as in claim 2 , wherein the notch filter and PID parameters are generated directly from the continuous-time model.
7. A method as in claim 2 , comprising:
discretizing the identified continuous time model to form a digital model; and
generating the notch filter and PID parameters from the digital model.
8. A method as in claim 1 , wherein the resultant PID controller is implemented using analog circuitry.
9. A method as in claim 1 wherein the resultant PID controller is implemented using digital logic.
10. A method as in claim 1 , wherein the filter parameters correspond to a notch filter with a gain, resonant frequency, and quality factor derived from the dynamics of the model.
11. A method as in claim 1 , wherein:
one of the filter parameters is gain; and
the gain is selected such that magnitude of a response of the PID controller is at a desired valued for a given frequency.
12. A method as in claim 1 , wherein:
one of the filter parameters is gain; and
the gain is selected such that an open loop magnitude of a combined PID controller and scanning probe microscope model is unity at a desired frequency.
13. A method as for controlling a scanning probe microscope including a cantilever and an actuator, the method comprising: automatically generating PID parameters that include a proportional gain, an integral gain, and a derivative gain, wherein automatically generating the PID parameters includes,
measuring a closed loop system response during operation with a nominal controller;
deriving an open loop system response from the measured closed loop system response;
removing an effect of the nominal controller from the derived open loop system response to yield a response of the actuator of the scanning probe microscope;
performing a curve fit on a selected portion of the response of the actuator to obtain a transfer function; and
generating resonance parameters from the transfer function, and using the generated resonance parameters to design a PID controller; and applying the PID parameters to operate the actuator beyond a resonant frequency of the actuator.
14. An instrument comprising:
a scanning probe microscope including a cantilever and an actuator;
a proportional-integral-derivative (PID) parameter generator that:
generates a scanning probe microscope model according to associated dynamics of the scanning probe microscope;
selects filter parameters that shape selected dynamics of the scanning probe microscope model;
generates a notch filter using the filter parameters; and
encodes the notch filter as PID parameters; and
a PID controller that receives the PID parameters and controls the scanning probe microscope.
15. An instrument as in claim 14 , wherein the PID parameter generator that generates a scanning probe microscope model comprises a PID parameter generator that generates a continuous-time model.
16. An instrument as in claim 14 , wherein the PID parameter generator that generates a scanning probe microscope model comprises a PID parameter generator that generates a sampled-data model.
17. An instrument as in claim 14 , wherein the PID parameter generator that generates a scanning probe microscope model comprises a PID parameter generator that:
measures an open bop frequency response of the scanning probe microscope; and
extracts an open loop physical system model of the scanning probe microscope dynamics.
18. An instrument as in claim 14 , wherein the PID parameter that generates a scanning probe microscope model comprises a PID parameter that:
measures a closed loop frequency response of the scanning probe microscope; and
extracts an open loop physical system model of the scanning probe microscope dynamics.