IP Library Granted Patent US 8,072,402
Granted Patent B2
US 8,072,402 · App. 11/847,205 · Granted Dec 6, 2011

Interferometric optical modulator with broadband reflection characteristics

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Quick Facts
Patent No.
US 8,072,402
App. No.
11/847,205
Granted
Dec 6, 2011
Kind
B2
Abstract

An optical device suitable for forming a pixel in a video display. The optical device includes a first layer having a first refractive index; a second layer over the first layer, the second layer having a second refractive index less than the first refractive index; and a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and a fourth layer that is at least partially optically absorptive, wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.

Claims (43)

1. An optical device comprising:

an optical stack comprising:

a first layer having a first refractive index, the first layer having a thickness in a range between about 700 angstroms and about 1350 angstroms;

a second layer over the first layer, the second layer having a second refractive index less than the first refractive index, the second layer having a thickness in a range between about 900 angstroms and about 1400 angstroms; and

a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and

a fourth layer that is at least partially optically absorptive,

wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.

2. The optical device of claim 1 , wherein at least one of the first layer and the third layer includes two or more sub-layers.

3. The optical device of claim 2 , wherein one of the sub-layers has a fourth refractive index greater than the second refractive index.

4. The optical device of claim 2 , wherein one of the sub-layers is electrically conductive.

5. The optical device of claim 1 , wherein a region between the optical stack and the at least partially optically absorptive layer has a fifth refractive index that is less than the third refractive index.

6. The optical device of claim 1 , wherein at least one of the first layer and the third layer is electrically conductive.

7. The optical device of claim 1 , wherein the first refractive index and the third refractive index are both greater than about 1.7.

8. The optical device of claim 1 , wherein the second refractive index is less than about 1.5.

9. The optical device of claim 1 , wherein the first layer or third layer includes indium tin oxide, silicon nitride, titanium oxide, zirconium oxide, yttrium oxide, antimony oxide, or zinc selenide.

10. The optical device of claim 1 , wherein the second layer includes cryolite, magnesium fluoride, or fluorinated SiO x .

11. The optical device of claim 1 , wherein the fourth layer includes molybdenum, nickel, silicon, TiN x W y , titanium nitride, germanium, carbon, iron, chromium, tungsten, Si x Ge 1-x , or tin nitride.

12. The optical device of claim 1 , wherein the third layer has a thickness in a range between about 100 angstroms and about 550 angstroms.

13. The optical device of claim 1 , wherein the fourth layer has a thickness in a range between about 30 angstroms and about 3000 angstroms.

14. The optical device of claim 1 , wherein the first distance is in a range between about 1300 Å and about 2300 Å or between about 3000 Å and 4500 Å.

15. The optical device of claim 1 , wherein the second distance is approximately zero.

16. The optical device of claim 1 , wherein the optical device in the first state has a first reflectance and the optical device in the second state has a second reflectance, the ratio of the first reflectance to the second reflectance of the optical device being greater than about ten.

17. The optical device of claim 16 , wherein the ratio is greater than about one hundred.

18. The optical device of claim 1 , wherein the optical device in the first state has a reflected spectral power distribution of visible light which substantially corresponds to the standard white point D65.

19. The optical device of claim 1 , wherein the fourth layer is mounted on a mechanical support layer.

20. The optical device of claim 19 , wherein the mechanical support layer includes nickel.

21. The optical device of claim 1 , wherein the optical stack is mounted on an at least partially optically transmissive substrate.

22. The optical device of claim 21 , wherein the at least partially optically transmissive substrate includes glass.

23. The optical device of claim 1 , wherein the optical device is included in a pixel in a display, and further comprising

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

24. The optical device of claim 23 , further comprising a driver circuit configured to send at least one signal to said display.

25. The optical device of claim 24 , further comprising a controller configured to send at least a portion of said image data to said driver circuit.

26. The optical device of claim 23 , further comprising an image source module configured to send said image data to said processor.

27. The optical device of claim 26 , wherein said image source module includes at least one of a receiver, transceiver, and transmitter.

28. The optical device of claim 23 , further comprising an input device configured to receive input data and to communicate said input data to said processor.

29. An optical device comprising:

first means for reflecting and transmitting light, the first means having a first refractive index, the first means having a thickness in a range between about 700 angstroms and about 1350 angstroms;

second means for reflecting and transmitting light, the second means over the first means, the second means having a second refractive index less than the first refractive index, the second means having a thickness in a range between about 900 angstroms and about 1400 angstroms; and

third means for reflecting and transmitting light, the third means over the second means, the third means having a third refractive index larger than the second refractive index; and

fourth means for reflecting and absorbing light, wherein the third means and the fourth means are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.

30. The optical device of claim 29 , wherein the first means includes layer of material having the first refractive index, the second means includes a layer of material having the second refractive index, and third means includes a layer of material having the third refractive index.

31. The optical device of claim 29 , wherein the fourth means includes a layer of at least partially optically absorptive material.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 31, 2016
From: QUALCOMM MEMS TECHNOLOGIES, INC.
To: SNAPTRACK, INC.
Reel/Frame 039891/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2008
From: QUALCOMM INCORPORATED
To: QUALCOMM MEMS TECHNOLOGIES, INC.
Reel/Frame 020571/0253 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2007
From: XU, GANG
To: QUALCOMM INCORPORATED
Reel/Frame 019776/0364 →