Thin film dielectrics with perovskite structure and preparation thereof
View Patent ↗Methods of making a ternary oxide and a perovskite-related ternary oxide structure are described. The methods include reacting a binary oxide with a metal oxide or a metal hydroxide to form a ternary oxide dielectric layer on a substrate. Powders, anodes, pressed articles, and capacitors including the ternary oxide or perovskite-related ternary oxide structure as a dielectric layer or other layers are further described.
1. A method of making a ternary oxide comprising:
reacting a binary oxide with a metal material to form a ternary oxide dielectric layer on a substrate, wherein said metal material is different than said binary oxide, wherein said metal material is a metal oxide, a metal carbonate, a metal nitrate, a metal halide, a metal hydroxide, a metal fluoride, or combinations thereof, wherein said reacting comprises:
fusing said binary oxide with said metal material to form a solid material;
dissolving said solid material in a first solution;
disposing said first solution or a derivative of said first solution onto said substrate; and
heating said substrate having said first solution disposed thereon or an evaporated film of the first solution disposed thereon under vacuum, wherein said binary oxide reacts with the metal material to produce a ternary oxide dielectric.
2. The method of claim 1 , wherein said disposing comprises coating, spraying, dipping, exposing to vapors, or combinations thereof.
3. The method of claim 1 , wherein said solid material comprises a fused material.
4. The method of claim 1 , wherein said first solution comprises water.
5. The method of claim 1 , wherein said substrate is a metal substrate.
6. The method of claim 1 , wherein said substrate is a metal substrate heated to a temperature of from about 150° C. to about 1400° C.
7. The method of claim 1 , wherein said substrate is a metal substrate heated to a temperature of from about 150° C. to about 1400° C. and for about 1 hour to about 36 hours.