Substrate holder assembly device
View Patent ↗A device for mounting and removing a substrate from a baseplate, in particular a substrate holder assembly device, including automated features for latching and unlatching a substrate, for use in a coating mechanism, from a baseplate, which includes an adjustable snap ring holder.
1. A substrate holder assembly device for assembling and disassembling a substrate holder of the type including a base with a detent, and a cover with a catch for engaging the detent and securing the cover to the base, comprising:
a substrate holder mount for supporting the substrate holder face down;
a substrate holder loading dock for supporting the substrate holder face up during assembly and disassembly;
a lifting arm moveable between the substrate holder mount and the substrate holder loading dock for picking the substrate holder up, turning the substrate holder over, and placing the substrate holder on the substrate holder loading dock; and
actuator means extending from the substrate holder loading dock for disengaging the detent from the catch, thereby enabling the cover to be separated from the base, and a substrate to be loaded or unloaded from the substrate holder.
2. The device according to claim 1 , wherein the lifting arm includes a locking finger for engaging a locking groove on the base for securing the substrate holder to the lifting arm.
3. The device according to claim 1 , wherein the lifting arm is pivotally mounted between the substrate holder mount and the substrate holder loading dock, whereby rotation of the lifting arm from the substrate holder mount to the substrate holder loading dock flips the substrate holder from face down to face up.
4. The device according to claim 1 , wherein the actuator means includes a plurality of moveable actuators spaced apart on the substrate holder loading dock for engaging a plurality of detents mounted on the base.
5. The device according to claim 4 , wherein the moveable actuators reciprocate radially inwardly for sliding the detents radially inwardly to release the detents from the catches.
6. The device according to claim 4 , wherein the substrate holder mount includes a plurality of indicators corresponding to the relative position of the moveable actuators, whereby alignment of the detents with the indicators in the substrate holder mount ensures that the detents are aligned with the moveable actuators in the substrate holder loading dock.
7. The device according to claim 6 , wherein the substrate holder mount includes a plurality of spaced apart pedestals, each pedestal providing one of the plurality of indicators.
8. The device according to claim 7 , wherein each pedestal includes a beveled face for guiding the substrate holder to a rest position.
9. The device according to claim 1 , further comprising a substrate holder comprising:
a base including a plurality of detents reciprocatable thereon; and
a cover including a plurality of catches for engaging the detents.
10. The device according to claim 9 , wherein each detent comprises a latching surface for engaging a respective camming surface; and an abutment surface for engaging a respective actuator.
11. The device according to claim 10 , wherein the latching surface is at an acute angle to the base, whereby the latching surface is engageable by the camming surface at a plurality of positions depending upon the thickness of the substrate.
12. The device according to claim 10 , further comprising spring means for biasing the latching surfaces into engagement with the camming surfaces.
13. The device according to claim 10 , wherein the cover includes an annular flange extending around a circumference of the base; and wherein an outer free edge of the flange forms the catches with the camming surfaces.
14. The device according to claim 10 , the cover is between 0.005 and 0.015 inches thick, and fabricated from electro-tinned steel, enabling the cover to be disposable after one or two uses.
15. The device according to claim 1 , further comprising a removal tool for engaging a locking groove on the base for picking the substrate holder up when mounted on the substrate holder mount.
16. The device according to claim 15 , wherein the removal tool includes an elongated handle, a fixed bracket for engaging one side of the locking groove, a sliding bracket for engaging an opposite side of the locking groove, and an actuator mounted on the elongated handle for actuating the sliding bracket into and out of engagement with the locking groove.