Post passivation interconnection schemes on top of IC chip
View Patent ↗A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over the layer of dielectric, a thick second layer of dielectric is created over the surface of the layer of passivation. Thick and wide interconnect lines are created in the thick second layer of dielectric. The first layer of dielectric may also be eliminated, creating the wide thick interconnect network on the surface of the layer of passivation that has been deposited over the surface of a substrate.
1. A method for fabricating a chip, comprising:
providing a silicon substrate, a first interconnecting structure over said silicon substrate, wherein said first interconnecting structure comprises multiple sub-micron lines formed by a sub-micron process comprising a damascene process, an electroplating process and a CMP process, multiple patterned circuit layers over said silicon substrate, and multiple dielectric layers between said multiple patterned circuit layers; and
forming a second interconnecting structure over said silicon substrate, wherein said second interconnecting structure comprises an interconnect line having a thickness greater than 1 micrometer, wherein said forming said second interconnecting structure comprises a tens-micron process comprising forming a first metal layer, next forming a patterned photoresist layer, next electroplating a second metal layer, next removing said patterned photoresist layer, and then etching said first metal layer.
2. The method of claim 1 , wherein said forming said first metal layer comprises a sputtering process.
3. The method of claim 1 further comprising providing a polymer layer over said silicon substrate, wherein said polymer layer comprises a portion over said second interconnecting structure.
4. The method of claim 3 , wherein said polymer layer has a thickness greater than 2 micrometers.
5. The method of claim 1 further comprising providing an ESD circuit in or on said silicon substrate, wherein said ESD circuit is connected to said second interconnecting structure through said first interconnecting structure.
6. The method of claim 1 further comprising providing a driver, receiver or I/O circuit in or on said silicon substrate, wherein said driver, receiver or I/O circuit is connected to said second interconnecting structure through said first interconnecting structure.
7. The method of claim 1 further comprising providing an internal circuit in or on said silicon substrate, wherein said internal circuit is connected to said second interconnecting structure through said first interconnecting structure.
8. A method for fabricating a chip, comprising:
providing a silicon substrate, a first interconnecting structure over said silicon substrate, wherein said first interconnecting structure comprises multiple sub-micron lines formed by a sub-micron process comprising a damascene process, an electroplating process and a CMP process, multiple patterned circuit layers over said silicon substrate, multiple dielectric layers between said multiple patterned circuit layers, and a passivation layer over said first interconnecting structure, over said multiple patterned circuit layers and over said multiple dielectric layers, wherein said passivation layer comprises a nitride layer; and
forming a second interconnecting structure over said passivation layer, wherein said second interconnecting structure comprises an interconnect line having a thickness greater than 1 micrometer, wherein said forming said second interconnecting structure comprises a tens-micron process comprising forming a first metal layer, next forming a patterned photoresist layer, next electroplating a second metal layer, next removing said patterned photoresist layer, and then etching said first metal layer.
9. The method of claim 8 , wherein said forming said first metal layer comprises a sputtering process.
10. The method of claim 8 further comprising providing a polymer layer over said passivation layer, wherein said polymer layer comprises a portion over said second interconnecting structure.
11. The method of claim 10 , wherein said polymer layer has a thickness greater than 2 micrometers.
12. The method of claim 8 further comprising providing an ESD circuit in or on said silicon substrate, wherein said ESD circuit is connected to said second interconnecting structure through said first interconnecting structure.
13. The method of claim 8 further comprising providing a driver, receiver or I/O circuit in or on said silicon substrate, wherein said driver, receiver or I/O circuit is connected to said second interconnecting structure through said first interconnecting structure.
14. The method of claim 8 further comprising providing an internal circuit in or on said silicon substrate, wherein said internal circuit is connected to said second interconnecting structure through said first interconnecting structure.
15. A method for fabricating a chip, comprising:
providing a silicon substrate, a first interconnecting structure over said silicon substrate, wherein said first interconnecting structure is formed by a process comprising a damascene process, an electroplating process and a CMP process, multiple patterned circuit layers over said silicon substrate, multiple dielectric layers between said multiple patterned circuit layers, and a separating layer over said first interconnecting structure, over said multiple patterned circuit layers and over said multiple dielectric layers, wherein said separating layer comprises a layer of a nitrogen-containing compound; and
forming a second interconnecting structure over said separating layer, wherein said forming said second interconnecting structure comprises forming a first metal layer, next forming a patterned photoresist layer, next electroplating a second metal layer, next removing said patterned photoresist layer, and then etching said first metal layer.
16. The method of claim 15 , wherein said forming said first metal layer comprises a sputtering process.
17. The method of claim 15 further comprising providing a polymer layer over said separating layer, wherein said polymer layer comprises a portion over said second interconnecting structure.
18. The method of claim 17 , wherein said polymer layer has a thickness greater than 2 micrometers.
19. The method of claim 15 further comprising providing a driver, receiver or I/O circuit in or on said silicon substrate, wherein said driver, receiver or I/O circuit is connected to said second interconnecting structure through said first interconnecting structure.
20. The method of claim 15 further comprising providing an ESD circuit in or on said silicon substrate, wherein said ESD circuit is connected to said second interconnecting structure through said first interconnecting structure.
21. A method for fabricating a chip, comprising:
providing a silicon substrate, a dielectric layer over said silicon substrate, a first interconnecting structure over said silicon substrate and in said dielectric layer, a second interconnecting structure over said silicon substrate and in said dielectric layer, wherein said first and second interconnecting structures are formed by a process comprising a damascene process, an electroplating process and a CMP process, and a separating layer over said dielectric layer, wherein said separating layer comprises a nitride; and
forming a clock interconnect and a polymer layer over said separating layer, wherein said polymer layer has a portion over said clock interconnect, wherein said first interconnecting structure is connected to said second interconnecting structure through said clock interconnect, wherein said forming said clock interconnect comprises forming a first metal layer, next forming a patterned photoresist layer, next electroplating a second metal layer, next removing said patterned photoresist layer, and then etching said first metal layer.
22. The method of claim 21 , wherein said forming said first metal layer comprises a sputtering process.
23. The method of claim 21 , wherein said polymer layer has a thickness greater than 2 micrometers.
24. A method for fabricating a chip, comprising:
providing a silicon substrate and a first interconnecting structure over said silicon substrate, wherein said first interconnecting structure is formed by a process comprising a damascene process, an electroplating process and a CMP process; and
forming a second interconnecting structure connected to said first interconnecting structure, wherein said forming said second interconnecting structure comprises forming a first metal layer, next forming a patterned photoresist layer, next electroplating a second metal layer, next removing said patterned photoresist layer, and then etching said first metal layer.
25. The method of claim 24 , wherein said forming said first metal layer comprises a sputtering process.
26. The method of claim 24 further comprising providing a polymer layer over said silicon substrate, wherein said polymer layer comprises a portion over said second interconnecting structure.