Method and apparatus for detecting and adjusting substrate height
View Patent ↗A method and apparatus 10 for detecting the height of non-flat and transparent substrates using one or more reflectors 30 patterned on the surface of the substrate 40 and adjusting the position of the substrate in its holder based on measurement of the height of the reflectors in comparison to a calibration marker 60 on the holder and using appropriate spacers 50 with appropriate thickness to adjust the placement of the substrate at various locations to place the greatest portion of the substrate in an optimal focal range of the lithography system.
1. An apparatus for adjusting placement of a substrate in a lithography system to place the substrate in a desired focal range of the lithography system, comprising:
a height detection device,
a substrate holder for receiving the substrate;
at least one holder clamp for retaining the substrate in said substrate holder;
at least one reflector patterned on a surface of the substrate for determining a height of said substrate surface wherein a height of said at least one reflector from said surface of the substrate is known;
a calibration marker on said substrate holder to serve as a height reference;
at least one spacer for placement under said at least one holder clamp to place said substrate surface in said acceptable focal plane range of said lithography system;
wherein said known height of said at least one reflector is compared to a height of said calibration marker using said height detection device to determine if said substrate surface is within said acceptable focal range of said lithography tool and adjusting a position and a placement of said substrate within said substrate holder using said at least one spacer to place said substrate surface within said acceptable focal range.
2. The apparatus of claim 1 wherein the substrate is transparent.
3. The apparatus of claim 1 wherein said surface of the substrate is non-flat.
4. The apparatus of claim 1 wherein the substrate is made of material selected from the list of gallium nitride, gallium arsenide, silicon carbide, sapphire, silicon, indium phosphide, quartz, silicon oxide, glass, and plastic.
5. The apparatus of claim 1 wherein said reflector is made of material selected from the list of gold, silver, nickel, platinum, aluminum, copper, titanium, tungsten, nichrome, molybdenum, palladium, steel, brass, other metals and alloys and combinations thereof.
6. The apparatus of claim 1 wherein said reflector thickness ranges between 500 Angstroms and 5000 Angstroms.
7. The apparatus of claim 1 wherein said spacer thickness ranges from 1 micrometer to 50 micrometers.
8. The apparatus of claim 1 wherein said reflectors have diameters from 5 micrometers to 3 millimeters.
9. The apparatus of claim 1 wherein said lithography system is selected from the group of optical and E-Beam lithography systems.
10. The apparatus of claim 1 wherein said lithography system is an E-Beam lithography system.
11. The apparatus of claim 1 wherein said calibration marker is present on said surface of the substrate.