Inkjet printhead nozzle incorporating movable roof structures
View Patent ↗A printhead is provided for an inkjet printer. The printhead includes a plurality of nozzle arrangements arranged in staggered rows. Each nozzle arrangement includes a substrate assembly defining an ink inlet channel. A static nozzle chamber wall extends from the substrate assembly and surrounds the ink inlet channel. A movable roof structure defines a movable nozzle chamber wall surrounding the static nozzle chamber wall. The movable nozzle chamber wall, together with the static nozzle chamber wall, defines a nozzle chamber in fluid communication with the ink inlet channel. The roof structure further defines an ink ejection port in fluid communication with the nozzle chamber. A thermal actuator includes an anchor located outside the static nozzle chamber wall and a plurality of actuator arms extending from the anchor to the roof structure. The thermal actuator is configured so that, upon actuation, the roof structure moves responsive to differential expansion of the arms and ink within the nozzle chamber is thereby ejected from the ink ejection port.
1. A printhead for an inkjet printer, the printhead having a plurality of nozzle arrangements arranged in staggered rows, each nozzle arrangement comprising:
a substrate assembly defining an ink inlet channel;
a static nozzle chamber wall extending from the substrate assembly and surrounding the ink inlet channel;
a roof structure defining a movable nozzle chamber wall surrounding the static nozzle chamber wall and which, together with the static nozzle chamber wall, defines a nozzle chamber in fluid communication with the ink inlet channel, the roof structure further defining an ink ejection port in fluid communication with the nozzle chamber; and
a thermal actuator comprising an anchor located outside the static nozzle chamber wall and a plurality of actuator arms extending from the anchor to the roof structure, the thermal actuator being configured so that, upon actuation, the roof structure moves responsive to differential expansion of the arms and ink within the nozzle chamber is ejected from the ink ejection port.
2. A printhead as claimed in claim 1 , wherein the static nozzle chamber wall has a re-entrant section to facilitate fluidic sealing with the movable nozzle chamber wall.
3. A printhead as claimed in claim 1 , wherein the roof structure further defines a nozzle rim bounding the ink ejection port.
4. A printhead as claimed in claim 3 , wherein the roof structure further defines a plurality of recesses extending radially from the rim to contain ink flow.
5. A printhead as claimed in claim 1 , wherein each nozzle arrangement has a rectangular and elongate configuration.
6. A printhead as claimed in claim 1 , wherein the substrate assembly comprises:
a silicon wafer substrate;
a silicon dioxide layer positioned on the wafer substrate; and
a pair of aligned aluminum electrode contact layers positioned on the silicon dioxide layer and to which the thermal actuator is electrically connected; and
an ink passivation layer in the form of a layer of silicon nitride positioned over the contact layers and the silicon dioxide layer.
7. A printhead as claimed in claim 6 , wherein the anchor comprises a pair of active anchor portions electrically connected to the contact layers and a pair of passive anchor portions.
8. A printhead as claimed in claim 7 , wherein the plurality of arms comprises a pair of inner actuator arms and a pair of outer actuator arms, each inner actuator arm being connected to a respective active anchor portion and each outer actuator arm being connected to a respective passive anchor portion.