Inkjet printhead integrated circuit with work transmitting structures
View Patent ↗An inkjet printhead integrated circuit has a substrate. A drive circuitry layer is positioned on the substrate. The substrate and the drive circuitry layer define a plurality of ink inlet channels. Nozzle chamber walls and roofs spanning the nozzle chamber walls are positioned on the substrate to define nozzle chambers in fluid communication with respective ink inlet channels. The roofs define respective ink ejection ports. Ink ejection members are positioned in respective nozzle chambers and are displaceable with respect to the roofs to eject ink from the ink ejection ports. Thermal actuators are outside of and associated with respective nozzle chambers and are connected to the drive circuitry layer to move with respect to the substrate on receipt of electrical signals from the drive circuitry layer. Work transmitting structures define at least one of the walls of respective nozzle chambers and are configured to transmit work from the actuators to the ink ejection members. Pairs of work transmitting structures and associated ink ejection members each have a common layer of fabrication material.
1. An inkjet printhead integrated circuit that comprises
a substrate;
a drive circuitry layer positioned on the substrate, the substrate and the drive circuitry layer defining a plurality of ink inlet channels;
nozzle chamber walls and roofs spanning the nozzle chamber walls are positioned on the substrate to define nozzle chambers in fluid communication with respective ink inlet channels, the roofs defining respective ink ejection ports;
ink ejection members positioned in respective nozzle chambers and displaceable with respect to the roofs to eject ink from the ink ejection ports;
thermal actuators outside of and associated with respective nozzle chambers and connected to the drive circuitry layer to move with respect to the substrate on receipt of electrical signals from the drive circuitry layer; and
work transmitting structures defining at least one of the walls of respective nozzle chambers and configured to transmit work from the actuators to the ink ejection members, pairs of work transmitting structures and associated ink ejection members each having a common layer of fabrication material.
2. An inkjet printhead integrated circuit as claimed in claim 1 , in which the substrate is a silicon wafer substrate.
3. An inkjet printhead integrated circuit as claimed in claim 1 , in which the roofs each define a nozzle rim about a respective ink ejection port and a recess to accommodate ink spread.
4. An inkjet printhead integrated circuit as claimed in claim 1 , in which the ink ejection members are in the form of paddles that span respective ink inlet channels.
5. An inkjet printhead integrated circuit as claimed in claim 1 , in which each work transmitting structure is in the form of a lever mechanism having an effort formation connected to a respective thermal actuator, a load formation connected to a respective ink ejection member and an fulcrum formation interposed between the effort and load formations and fast with the substrate.
6. An inkjet printhead integrated circuit as claimed in claim 5 , in which each load formation forms part of one of the walls of an associated nozzle chamber.
7. An inkjet printhead integrated circuit as claimed in claim 5 , in which the fulcrum formation and load formation of each lever mechanism are composite with a primary layer and a secondary layer, the layers being resiliently deformable to facilitate pivotal movement of the fulcrum formation with respect to the substrate.
8. An inkjet printhead integrated circuit as claimed in claim 7 , in which the ink ejection member is composite with a primary layer and a secondary layer formed by an extension of the primary layer and the secondary layer of the fulcrum and load formations.