Semiconductor element comprising a supporting structure and production method
One or more embodiments are related to a semiconductor component comprising a supporting structure arranged in a first layer sequence, a second layer arranged above the first layer sequence, and a bonding pad. The layer sequence may comprise a plurality of layers of a dielectric and the bonding pad is arranged above the second layer. The supporting structure may comprise a plurality of supporting substructures and is formed under partial regions of the bonding pad.
1. A semiconductor component, comprising:
a supporting structure arranged in a first layer sequence, the first layer sequence comprising a plurality of layers of a low-k dielectric;
a second layer arranged above the first layer sequence;
a bonding pad arranged above the second layer, the supporting structure comprising a plurality of supporting substructures and being formed under partial regions of the bonding pad, the supporting substructures being laterally spaced from each other, the supporting substructures arranged in such a way that an inner region and an outer region without the supporting structure remains below the bonding pad, each of the supporting substructures arranged in the same layers of the first layer sequence; and
a functional interconnect arranged between two adjacent laterally spaced supporting substructures, the functional interconnect connecting the inner region to the outer region.
2. The semiconductor component of claim 1 , wherein the supporting substructures are arranged in ring-shaped fashion.
3. The semiconductor component of claim 1 , wherein the supporting substructures are composed of interconnect sections which are arranged in adjacent dielectric layers of the first layer sequence and are connected to one another by supporting vias.
4. The semiconductor component of claim 3 , wherein the interconnect sections have a length and a width, the length being greater than the width and the longitudinal orientation of a first interconnect section being parallel to the longitudinal orientation of a second interconnect section formed in an adjacent dielectric layer.
5. The semiconductor component of claim 3 , wherein the interconnect sections have a length and a width, the length being greater than the width and the longitudinal orientation of a first interconnect section being orthogonal with respect to the longitudinal orientation of a second interconnect section formed in an adjacent dielectric layer.
6. The semiconductor component of claim 4 , wherein the longitudinal orientation of the interconnect sections of adjacent supporting substructures is parallel with respect to one another.
7. The semiconductor component of claim 4 , wherein the longitudinal orientation of the interconnect sections of adjacent supporting substructures is orthogonal with respect to one another.
8. A method of forming a semiconductor component, comprising:
forming a supporting structure arranged in a first layer sequence, the first layer sequence comprising a plurality of layers of a low-k dielectric;
forming a second layer arranged above the first layer sequence;
forming a bonding pad arranged above the second layer, the supporting structure comprising a plurality of supporting substructures and being formed under partial regions of the bonding pad, the supporting substructures being laterally spaced from each other, the supporting substructures arranged in such a way that an inner region and an outer region without the supporting structure remains below the bonding pad, each of the supporting substructures arranged in the same layers of the first layer sequence; and
forming a functional interconnect arranged between two adjacent laterally spaced supporting substructures, the functional interconnect connecting the inner region to the outer region.
9. The semiconductor component of claim 1 , wherein the supporting substructures are electrically isolated from each other.
10. The semiconductor component of claim 8 , wherein the supporting substructures are electrically isolated from each other.