Thin film transistor array panel and manufacturing method thereof
View Patent ↗A manufacturing method for a thin film transistor array panel including forming a gate electrode, forming an insulating layer on the gate electrode, sequentially forming a lower conducting layer and a upper conducting layer on the insulating layer, etching the upper conducting layer to form a first source electrode and a first drain electrode, etching the lower conducting layer to form the second source electrode and the second drain electrode, over-etching the second source electrode and the second drain electrode, and forming an organic semiconductor between the second source electrode and the second drain electrode.
1. A thin film transistor array panel, comprising:
a gate electrode;
an insulating layer formed on the gate electrode;
an organic semiconductor formed on the insulating layer;
a source electrode and a drain electrode formed on the organic semiconductor and disposed opposite each other; and
a pixel electrode connected to the drain electrode,
wherein the source electrode and the drain electrode include a first source electrode and a first drain electrode disposed opposite each other with a first interval therebetween and a second source electrode and a second drain electrode disposed opposite each other with a second interval therebetween,
wherein the first source electrode and the first drain electrode are disposed on the second source electrode and the second drain electrode, and
wherein the second interval is longer than the first interval.
2. The thin film transistor array panel of claim 1 , wherein the organic semiconductor is disposed between the second source electrode and the second drain electrode.
3. The thin film transistor array panel of claim 2 , wherein the second source electrode and the second drain electrode are over-etched as compared with the first source electrode and the first drain electrode.
4. The thin film transistor array panel of claim 1 , further comprising:
a bank formed on the first source electrode and the first drain electrode and having a first opening exposing the organic semiconductor.
5. The thin film transistor array panel of claim 4 , further comprising:
a passivation layer disposed in the first opening.
6. The thin film transistor array panel of claim 4 , further comprising:
a gate line connected to the gate electrode;
a data line connected to the source electrode; and
an organic layer having substantially the same planar shape as the data line, the source electrode, and the drain electrode, and disposed between the bank and the source electrode, and between the bank and the drain electrode.
7. The thin film transistor array panel of claim 1 , wherein the insulating layer has a second opening exposing the gate electrode, and further comprising: a gate insulator formed in the second opening.
8. The thin film transistor array panel of claim 1 , wherein the first source electrode and the first drain electrode include ITO, and the second source electrode and the second drain electrode include a metal.
9. The thin film transistor array panel of claim 8 , further comprising:
a third source electrode and a third drain electrode formed on the first source electrode and the first drain electrode, and
wherein the third source electrode and the third drain electrode include a metal having a different etching ratio from that included in the second source electrode and the second drain electrode.
10. The thin film transistor array panel of claim 9 , wherein the second source electrode and the second drain electrode include molybdenum, and the third source electrode and the third drain electrode include chromium.