Composition for stripping photoresist and method for manufacturing thin transistor array panel using the same
View Patent ↗The present invention provides a photoresist stripper including about 5 wt % to about 20 wt % alcohol amine, about 40 wt % to about 70 wt % glycol ether, about 20 wt % to about 40 wt % N-methyl pyrrolidone, and about 0.2 wt % to about 6 wt % chelating agent.
1. A photoresist stripper, comprising:
about 5 wt % to about 20 wt % alcohol amine;
about 40 wt % to about 70 wt % glycol ether;
about 20 wt % to about 40 wt % N-methyl pyrrolidone; and
about 0.2 wt % to about 6 wt % chelating agent, wherein the chelating agent is one of methyl gallate, hydroxyl ethyl piperazine (HEP), and a mixture thereof.
2. The photoresist stripper of claim 1 ,
wherein the alcohol amine is one of monoisopropanol amine (CH 3 CH(OH)CH 2 NH 2 ), N-monoethanol amine (HO(CH 2 ) 2 NH 2 ), and a mixture thereof.
3. The photoresist stripper of claim 1 ,
wherein the glycol ether is one of diethylene glycol monoethyl ether [C 2 H 5 O(CH 2 CH 2 O) 2 H)], methyl diglycol [CH 3 O(CH 2 CH 2 O) 2 H], butyl diglycol [C 4 H 9 O(CH 2 CH 2 O) 2 H], and a mixture thereof.
4. The photoresist stripper of claim 1 ,
wherein the alcohol amine is monoisopropanol amine (CH 3 CH(OH)CH 2 NH 2 ) and the glycol ether is butyl diglycol [C 4 H 9 O(CH 2 CH 2 O) 2 H].
5. The photoresist stripper of claim 1 , wherein concentrations of methyl gallate and hydroxyl ethyl piperazine (HEP) are substantially the same.
6. A photoresist stripper, comprising:
about 5 wt % to about 20 wt % N-monoethanol amine;
about 40 wt % to about 70 wt % butyl diglycol;
about 20 wt % to about 40% N-methyl pyrrolidone; and
about 0.2 wt % to about 6 wt % a chelating agent, wherein the chelating agent is one of methyl gallate, hydroxyl ethyl piperazine (HEP), and a mixture thereof.
7. A photoresist stripper, comprising:
about 5 wt % to about 20 wt % N-monoethanol amine;
about 40 wt % to about 70 wt % butyl diglycol;
about 20 wt % to about 40 wt % N-methyl pyrrolidone;
about 0.1 wt % to about 3 wt % methyl gallate; and
about 0.1 wt % to about 3 wt % hydroxyl ethyl piperazine.