Process for making a micro-fluid ejection head structure
View Patent ↗A method of making a micro-fluid ejection head structure and micro-fluid ejection heads made by the method. The method includes applying a tantalum oxide layer to a surface of a fluid ejection actuator disposed on a device surface of a substrate so that the tantalum oxide layer is the topmost layer of a plurality of layers including a resistive layer, and a protective layer selected from a passivation layer, a cavitation layer, and a combination of a passivation layer and a cavitation layer. The tantalum oxide layer has a thickness (t) that satisfies an equation t=(¼*W/n), wherein W is a wavelength of radiation from a radiation source, and n is a refractive index of the tantalum oxide layer. A photoimageable layer is also applied to the substrate. The photoimageable layer is imaged with the radiation source and then developed.
1. A micro-fluid ejection head, comprising:
a substrate including at least one ejection actuator, wherein the ejection actuator includes a resistive layer, and at least one protective layer selected from a passivation layer and a cavitation layer;
a tantalum oxide layer disposed as a topmost layer of the ejection actuator having a thickness (t) as determined by an equation t=(¼*W/n), wherein W is a wavelength of radiation from a radiation source, and n is a refractive index of the tantalum oxide layer; and
at least one photoimageable layer disposed on the substrate so that the tantalum oxide layer is disposed between the photoimageable layer and the substrate.
2. The ejection head of claim 1 , wherein the tantalum oxide layer is disposed between a metal layer on the surface of the substrate and the photoimageable layer.
3. The ejection head of claim 1 , wherein the photoimageable layer comprises a thick film layer that is imaged to provide fluid ejection chambers and fluid flow channels therein for flow of fluid to the fluid ejection actuator.
4. The ejection head of claim 1 , wherein the photoimageable layer comprises a nozzle plate layer that is imaged to provide fluid ejection orifices therein.
5. The ejection head of claim 1 , wherein the tantalum oxide layer has a thickness (t) ranging from about 300 Angstroms to about 5000 Angstroms.
6. The ejection head of claim 1 , wherein tantalum oxide layer comprises an oxidized portion of a tantalum cavitation layer of the fluid ejection actuator.
7. The ejection head of claim 1 , wherein the refractive index (n) of the tantalum oxide layer ranges from about 2.0 to about 2.5 in a wavelength range of from about 300 to about 500 nanometers.