Method of protecting nozzle guarded printhead during fabrication
View Patent ↗A method of fabricating a printhead is provided in which sacrificial material is deposited on a substrate having printing nozzles formed thereon so that a first portion of the sacrificial material encases the nozzles and a second portion of the sacrificial material forms part of a printing fluid containment formation surrounding one or more of the nozzles, positioning a nozzle guard over the nozzles so as to contact the second portion of the sacrificial material, and removing the first portion of the sacrificial material.
1. A method of fabricating a printhead comprising the steps of:
depositing sacrificial material on a substrate having printing nozzles formed thereon so that a first portion of the sacrificial material encases the nozzles and a second portion of the sacrificial material forms part of a printing fluid containment formation surrounding one or more of the nozzles;
positioning a nozzle guard over the nozzles so as to contact the second portion of the sacrificial material; and
removing the first portion of the sacrificial material.
2. A method as claimed in claim 1 , wherein the sacrificial material is a polyimide.
3. A method as claimed in claim 2 , wherein the positioning step includes contacting the nozzle guard and the second portion of the polyimide sacrificial material via an inorganic seal.
4. A method as claimed in claim 1 , wherein the positioning step includes positioning support struts of the nozzle guard on alignment formations extending from the substrate formed by the second portion of the sacrificial material, the alignment formations being configured to align apertures in the nozzle guard with the nozzles.
5. A method as claimed in claim 4 , wherein the removing step includes carrying out a plasma etching process through the apertures of the nozzle guard.
6. A method as claimed in claim 5 , wherein the plasma etching process is an oxygen plasma etch.