Method of manufacturing a magnetic write head for perpendicular magnetic recording
View Patent ↗A method for manufacturing a magnetic write head for perpendicular magnetic data recording. The method allows an upper write coil to be formed directly on a conformally deposited layer of non-magnetic material such as alumina which has been deposited over a magnetic shaping layer and write pole. The method allows the write coil to be constructed without the need for the deposition of a thick alumina fill layer and subsequent chemical mechanical polishing. This, therefore, avoids the necessity of such a chemical mechanical polishing step.
1. A method of manufacturing a magnetic write head for perpendicular magnetic data recording, the method comprising:
forming a magnetic shaping layer;
forming a magnetic write pole over the shaping layer;
forming a magnetic trailing shield over an end of the magnetic write pole, the trailing shield being separated from the magnetic write pole by a non-magnetic trailing gap layer;
forming a magnetic back gap layer, magnetically connected with the magnetic shaping layer;
conformally depositing a layer of non-magnetic, electrically insulating material;
forming a mask structure, the mask structure having an opening over each of the trailing shield and the magnetic back gap layer;
performing a reactive ion milling to remove portions of the conformally deposited layer of non-magnetic, electrically insulating material; and
forming an electrically conductive write coil over the conformally deposited thin layer of non-magnetic, electrically insulating material without an intervening chemical mechanical polishing step.
2. A method as in claim 1 wherein the conformally depositing a layer of non-magnetic, electrically insulating material comprises depositing alumina by atomic layer deposition.
3. A method as in claim 1 wherein the conformally depositing a layer of non-magnetic, electrically insulating material comprises depositing alumina by chemical vapor deposition.
4. A method as in claim 1 wherein the conformally deposited layer of non-magnetic, electrically insulating material is deposited to at thickness of 50 to 300 nm.
5. A method for manufacturing a magnetic write head for perpendicular magnetic data recording, comprising:
forming a first magnetic return pole;
forming a first electrically conductive write coil over the first magnetic return pole, the first electrically conductive write coil being electrically isolated from the first magnetic return pole;
forming a magnetic shaping layer over the electrically conductive write coil and the first return pole, the magnetic shaping layer being electrically isolated from the first electrically conductive write coil;
forming a first electrically conductive center post that is electrically connected with a portion of the first electrically conductive write coil;
forming a magnetic write pole over and in contact with the magnetic shaping layer;
forming a trailing magnetic shield over a portion of the write pole;
forming a magnetic back gap layer over a portion of the shaping layer;
conformally depositing a layer of non-magnetic, electrically insulating material over the trailing shield, write pole back gap and center post;
forming a mask structure over the conformally deposited layer, the mask structure having an opening over each of the trailing shield, back gap, and center post;
performing a reactive ion milling to remove portions of the conformally deposited, non-magnetic, electrically insulating material;
removing the structure; and
forming a second write coil over the conformally deposited, non-magnetic, electrically insulating layer.
6. A method as in claim 5 wherein the second write coil is formed without an intervening chemical mechanical polishing process being performed between the conformal deposition of the non-magnetic, electrically insulating layer and the formation of the second write coil.
7. A method as in claim 5 wherein the conformally depositing a layer of non-magnetic, electrically insulating material over the trailing shield, write pole back gap and center post, further comprises depositing alumina by atomic layer deposition.
8. A method as in claim 5 wherein the conformally depositing a layer of non-magnetic, electrically insulating material over the trailing shield, write pole back gap and center post further comprises depositing alumina by chemical vapor deposition.
9. A method as in claim 5 wherein the conformally deposited layer of non-magnetic, electrically insulating material is deposited to a thickness of 50-300 nm.