Perpendicular magnetic recording head having a pole tip formed with a CMP uniformity structure
View Patent ↗A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.
1. A perpendicular magnetic recording head comprising;
a chemical mechanical planarization (CMP) uniformity structure having an aperture therein, the CMP uniformity structure including a CMP support structure and a CMP barrier layer on the CMP support structure, the aperture extending through the CMP support structure and the CMP barrier layer, the aperture having an aperture width;
a perpendicular magnetic recording pole within the aperture, the pole having a pole width, the aperture width being at least ten multiplied by the pole width; and
an insulator in a remaining portion of the aperture.
2. The perpendicular magnetic recording head of claim 1 wherein the CMP support structure is insulating.
3. The perpendicular magnetic recording head of claim 2 wherein the CMP support structure has a thickness equal to at least 0.1 μm and no more than 0.4 μm.
4. The perpendicular magnetic recording head of claim 2 wherein a side of the perpendicular magnetic recording pole has a negative angle with respect to a vertical direction such that a top of the perpendicular magnetic recording pole is wider than a bottom of the perpendicular magnetic recording pole.
5. The perpendicular magnetic recording head of claim 1 further comprising:
a seed layer under the perpendicular magnetic recording pole.
6. The perpendicular magnetic recording head of claim 1 further comprising:
a write gap on the perpendicular magnetic recording pole; and
a shield on the write gap.
7. The perpendicular magnetic recording head of claim 1 wherein the CMP support structure has a thickness equal to at least a desired thickness of the perpendicular magnetic recording pole.
8. The perpendicular magnetic recording head of claim 1 wherein a side of the perpendicular magnetic recording pole has a negative angle with respect to a vertical direction such that a top of the perpendicular magnetic recording pole is wider than a bottom of the perpendicular magnetic recording pole and wherein the aperture has sidewalls substantially aligned with the vertical direction.
9. A perpendicular magnetic recording head comprising;
a chemical mechanical planarization (CMP) uniformity structure having an aperture therein, the CMP uniformity including an insulating CMP support structure and a CMP barrier layer on the CMP support structure, the aperture extending through the CMP support structure and the CMP barrier layer, the CMP support structure having a thickness equal to at least a desired thickness of the perpendicular magnetic recording pole, the aperture having an aperture width;
a plated perpendicular magnetic recording pole within the aperture, the plated perpendicular magnetic recording pole having a pole width, the aperture width being at least ten multiplied by the pole width;
an insulator in a remaining portion of the aperture;
a write gap on the plated perpendicular magnetic recording pole; and
a shield on the write gap.