Semiconductor laser and electronic device
View Patent ↗In one embodiment of the invention, in a semiconductor laser in which a first conductivity type lower cladding layer, an active layer that includes a quantum well layer, and a second conductivity type upper cladding layer are formed in this order on a semiconductor substrate, a dopant concentration of the lower cladding layer is not more than 4.0×10 17 /cm 3 , and a resonator length is not less than 1500 μm.
1. A semiconductor laser, comprising:
a first conductivity type lower cladding layer formed on a substrate;
an active layer that includes a quantum well layer formed above the lower cladding layer; and
a second conductivity type upper cladding layer formed above the active layer,
wherein a dopant concentration of the lower cladding layer is not more than 4.0×10 17 /cm 3 ,
wherein a resonator length is not less than 1500 μm, and
wherein the lower cladding layer comprises a first lower cladding layer on the semiconductor substrate side and a second lower cladding layer on the active layer side, wherein the first lower cladding layer comprising
a substrate side region located on the semiconductor substrate side and where light that is waveguided with the active layer is not distributed, and
an active layer side region located on the active layer side and where light that is waveguided with the active layer is distributed, and
wherein the dopant concentration in the substrate side region is set higher than the dopant concentration in the active layer side region.
2. A semiconductor laser, comprising:
a first conductivity type lower cladding layer formed on a substrate;
an active layer that includes a quantum well layer formed above the lower cladding layer; and
a second conductivity type upper cladding layer formed above the active layer, wherein
a dopant concentration of the lower cladding layer is not more than 2.0×10 17 /cm 3 , and
a resonator length is not less than 1800 μm.
3. A semiconductor laser, comprising:
a first conductivity type lower cladding layer formed on a substrate;
an active layer that includes a quantum well layer formed above the lower cladding layer; and
a second conductivity type upper cladding layer formed above the active layer,
wherein a dopant concentration of the lower cladding layer is not more than 4.0×10 17 /cm 3 ,
wherein a resonator length is not less than 1500 μm,
wherein the lower cladding layer comprises a first lower cladding layer on the semiconductor substrate side and a second lower cladding layer on the active layer side, and
wherein the dopant concentration in a semiconductor side region that is located on the semiconductor substrate side of the first lower cladding layer is set higher than the dopant concentration in an active layer side region that is located on the active layer side of the first lower cladding layer.
4. The semiconductor laser according to claim 2 ,
wherein the lower cladding layer comprises a first lower cladding layer on the semiconductor substrate side and a second lower cladding layer on the active layer side, and
wherein the dopant concentration in a semiconductor side region that is located on the semiconductor substrate side of the first lower cladding layer is set higher than the dopant concentration in an active layer side region that is located on the active layer side of the first lower cladding layer.
5. The semiconductor laser according to claim 2 ,
wherein the lower cladding layer comprises a first lower cladding layer on the semiconductor substrate side and a second lower cladding layer on the active layer side, the first lower cladding layer comprising
a substrate side region located on the semiconductor substrate side and where light that is waveguided with the active layer is not distributed, and
an active layer side region located on the active layer side and where light that is waveguided with the active layer is distributed, and
wherein the dopant concentration in the substrate side region is set higher than the dopant concentration in the active layer side region.
6. The semiconductor laser according to claim 1 , wherein the dopant concentration in the substrate side region is gradually increased relative to the dopant concentration in the active layer side region, beginning from the active layer side.
7. The semiconductor laser according to claim 2 ,
wherein the lower cladding layer comprises a first lower cladding layer on the semiconductor substrate side and a second lower cladding layer on the active layer side, the first lower cladding layer comprising
a substrate-side region located on the semiconductor substrate side and where light that is waveguided with the active layer is not distributed, and
an active layer side region located on the active layer side and where light that is waveguided with the active layer is distributed, and
the dopant concentration in the substrate side region is gradually increased relative to the dopant concentration in the active layer side region, beginning from the active layer side.
8. The semiconductor laser according to claim 3 , wherein the dopant concentration of the substrate side region is not less than 4.0×10 17 /cm 3 .
9. The semiconductor laser according to claim 3 , wherein the thickness of the substrate side region is not less than 30 nm and not more than 300 nm.
10. The semiconductor laser according to claim 8 , wherein the thickness of the substrate side region is not less than 30 nm and not more than 300 nm.
11. The semiconductor laser according to claim 1 , wherein a light-exiting end portion of the active layer has a window structure.
12. The semiconductor laser according to claim 3 , wherein a light-exiting end portion of the active layer has a window structure.
13. The semiconductor laser according to claim 1 , wherein the dopant of the lower cladding layer is silicon.
14. The semiconductor laser according to claim 3 , wherein the dopant of the lower cladding layer is silicon.
15. An electronic device that writes optical data, comprising:
a semiconductor laser according to claim 1 ; and
a laser driver IC arranged to drive the semiconductor laser.
16. An electronic device that writes optical data, comprising:
a semiconductor laser according to claim 3 ; and
a laser driver IC arranged to drive the semiconductor laser.
17. An electronic device that writes optical data, comprising:
a semiconductor laser according to claim 2 ; and
a laser driver IC arranged to drive the semiconductor laser.
18. The semiconductor laser according to claim 1 , wherein the dopant concentration of the substrate side region is not less than 4.0×10 17 /cm 3 .
19. The semiconductor laser according to claim 1 , wherein the thickness of the substrate side region is not less than 30 nm and not more than 300 nm.
20. The semiconductor laser according to claim 18 , wherein the thickness of the substrate side region is not less than 30 nm and not more than 300 nm.