Inkjet printhead comprising nozzle plate having improved robustness
View Patent ↗An inkjet printhead comprising a reinforced bi-layered nozzle plate structure spanning across a plurality of nozzles is provided. Typically, the nozzle plate structure comprises: a first nozzle plate spanning a plurality of nozzles, the first nozzle plate having a plurality of cavities defined therein; photoresist filling the cavities; and a second nozzle plate covering said the first nozzle plate and the photoresist.
1. An inkjet printhead comprising a reinforced bi-layered nozzle plate structure spanning across a plurality of nozzles, each nozzle comprising a nozzle chamber having a roof, each roof being defined by part of said nozzle plate structure, wherein said nozzle plate structure comprises:
a first nozzle plate spanning a plurality of nozzles, said first nozzle plate having a plurality of cavities defined therein;
photoresist filling completely each of said cavities; and
a second nozzle plate covering said first nozzle plate and said photoresist, and wherein said cavities filled with photoresist are not nozzle chambers.
2. The inkjet printhead of claim 1 , wherein said nozzle chambers are formed on a substrate.
3. The inkjet printhead of claim 2 , each nozzle chamber comprises said roof spaced apart from said substrate, and sidewalls extending between said roof and said substrate.
4. The inkjet printhead of claim 1 , wherein each roof has a nozzle aperture defined therein.
5. The inkjet printhead of claim 1 , wherein said second nozzle plate defines a planar, exterior surface of said printhead.
6. The inkjet printhead of claim 1 , wherein said first and second nozzle plates are comprised of the same or different materials.
7. The inkjet printhead of claim 6 , wherein said materials are ceramic materials depositable by PECVD.
8. The inkjet printhead of claim 6 , wherein said materials are independently selected from the group comprising: silicon nitride, silicon oxide and silicon oxynitride.
9. The inkjet printhead of claim 1 , wherein each nozzle chamber further comprises sidewalls extending between said roof and a substrate, and wherein said first nozzle plate and said sidewalls are comprised of the same material.
10. An inkjet printhead integrated circuit comprising:
a substrate having a plurality of nozzles formed thereon;
drive circuitry electrically connected to actuators associated with said nozzles; and
a reinforced bi-layered nozzle plate structure according to claim 1 .