Methods of forming a lens master plate for wafer level lens replication
View Patent ↗Methods of forming a lens master plate. In one embodiment, a substrate is coated with a polymer material layer. Isolated sections are formed in the polymer material layer. The isolated sections are formed into lens shapes using a lens master.
1. A method of forming a plurality of lenses on a substrate comprising:
forming a photo-patternable polymer on the substrate;
etching the photo-patternable polymer to form a plurality of container frames;
depositing lens material into the container frames; and
using a lens master to stamp a lens shape in the lens material.
2. The method of claim 1 , wherein the photo-patternable polymer is photoresist.
3. The method of claim 1 , wherein the lens material is liquid polymer.
4. The method of claim 1 , further comprising the step of dissolving the container frames after the lens shapes have been stamped.
5. The method of claim 1 , further comprising the step of etching the lens shapes into the substrate.
6. The method of claim 1 , wherein the lens shapes are each cured individually by ultraviolet light exposure during the stamping process.
7. The method of claim 1 , wherein the lens shapes are cured collectively by heat treatment after the stamping process is complete.
8. The method of claim 1 , further comprising providing excess areas in the lens master stamp for receiving excess lens material during the stamping process.
9. The method of claim 1 , wherein the lens shapes are cured collectively by ultraviolet light exposure after the stamping process is complete.
10. The method of claim 8 , further comprising curing the lens shapes collectively by heat treatment.